Pilot-scale Technology & Equipments for CVD Graphene<br>CVD石墨烯薄膜的中试技术与设备
Mass production of high-quality graphene is the footstone of graphene industry. We focus our efforts on chemical vapor deposition (CVD) growth of graphene films over 12 years, starting from lab-scale samples to pilot-scale products and further to commercial products. Fast progresses are also made on the home-built CVD equipments and production lines for meeting the versatile demands of graphene size, quality and production capacity. Our star products include, A3-size graphene films with a single crystalline domain size of ca. 500 micrometers and a production capacity of 10,000 m2/year, 4-inch single crystal graphene wafers with a capacity of 10,000 wafer/year, 10cm x 30cm superclean graphene films with a capacity of 1000 m2/year. Peeling off CVD graphene from growth metal substrate to target substrate is technically very challenging especially for large size graphene films. We have designed our batch-process systems fitting for different graphene products and also provide customized service for special substrates. A support team with a size of over 70 members has been created in Beijing Graphene Institute (BGI), covering R- D, equipment manufacturing, production line and marketing, targeting to provide the best quality CVD graphene products and production lines to the world.
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2021-07-26
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