Introduction
There is increasing need for the micro-analyst to correctly determine chemical composition of regions
on the sub-micron scale. Field emission SEMs offer an ideal tool for these tasks due their excellent
spatial resolution and high brightness sources. However, in order to analyze these types of samples the
accelerating voltage of the electron beam is commonly in the range 1-5kV. Traditionally when working
at these voltages low count rates necessitated the use of EDS detectors with large crystals to maximize
collection solid angle. Analysis using EDS at low kV is, however, complicated by the large number of
overlapped X-ray lines seen in this part of the spectrum. New field emission SEMs that offer high
currents at low kV are opening new opportunities to use the higher spectral resolution and sensitivity
of WDS to analyze samples on the sub-micron scale.
方案
材料中高空间分辨率显微分析检测方案(扫描透射电镜)