【求助】S-4800如何做烘烤

还有烘烤是不是很麻烦的啊，难度很高吗？

4800的烘烤其实不算麻烦，就是要注意一些细节，像高压棒必须放置在专门的座内，烘烤时间的设定（4800有预设的时间，也可以自己设定），但是烘烤时一旦IP跳掉，你自己多半救不会来的，只有找Service Engineer了。

其实S-4800的烘烤还是很简单的，但是如果你从来没做过，最好还是请工程师教你一次，那样更放心，下次自己就可以独立做了。

应助达人

日立的S4800要做烘烤的？学习了，第一次听到。FEI的SEM不用烘烤的呀。原谅只知道日本电子的透射电镜JEM－2100F要做烘烤

关机麻烦，要是整台仪器关了让离子泵运行，会对仪器有安全隐患吗？需要做哪些工作

冷场都需要做烘烤的，FEI没有冷场。

烘烤是使用冷场电镜的基本功，必须要学会，你总不能每次烘烤都花钱请工程师来吧。其实也很简单，但是说起来话比较长，懒得写那么多字。建议楼主请工程师来做一次，然后要点资料，以后多练几次就好了。

再强调一次，冷场电镜烘烤必须掌握。

烘烤并不能完全消除电镜污染物，上杭州葛兰帕网站看看现在流行的加在电镜上面的Plsama Cleaner，消除污染物，提高仪器稳定性以及提高分辨率。

Hitachi S4700: Spansion, Sunnyvale, California, USA
Improved resolution was observed, on a 5 year old instrument so that sputtered PT grains could be imaged at 5kV and < 3 nm resolution. The user says that the Evactron De-Contaminator is the only accessory one can buy for the SEM that will improve the performance of the instrument.

Hitachi S-4700: NIST Gaithersburg, Maryland, USA
NIST borrowed and later purchased an Evactron D-C for controlling contamination in an Hitachi S-4700 SEM. Their research on contamination control resulted in the paper "Active Monitoring and Control of Electron Beam Induced Contamination" Proc. SPIE Vol. 4344 (2001), 835, by András E. Vladár, Michael T. Postek and Ronald Vane. This study found that the Evactron device was "effective in cleaning the vacuum of the specimen chamber of laboratory and production metrology SEMs."

Hitachi S-4700: Oak Ridge National Laboratory, High Temperature Materials Lab, Oak Ridge, Tennessee, USA
Roughing pump oil backstreaming through the sample exchange chamber was causing dirty specimens and chamber contamination that could not be controlled with a liquid nitrogen (LN) cold finger. Contamination is controlled by use of both the plasma cleaning and the nitrogen purge features of an automatic Evactron system.

Hitachi S-4700: University of Illinois, Champaign-Urbana, Illinois, USA
A three year old Hitachi S-4700 SEM had constant contamination problems since being installed. The user had added a turbomolecular pump and heated micromaze foreline trap, but they made little difference. LN traps, top and bottom, had been kept in service constantly, but failed to stop contamination problems.

我们用的还是很老的机子S-3000H