wildonkey
第28楼2009/06/23
减速模式下2nm@2kv貌似是可以达到的,看FEI网站上quanta50的资料,减速模式下1kv可到2.3nm:
Electron Beam resolution
• High vacuum
- 0.8 nm at 30 kV (STEM)*
- 1.0 nm at 30 kV (SE)
- 2.5 nm at 30 kV (BSE)
- 3.0 nm at 1 kV (SE)
• High vacuum with beam deceleration option
- 3.0 nm at 1 kV (BD mode* + BSE)
- 2.3 nm at 1 kV (BD mode* + ICD*)
- 3.1 nm at 200 V (BD mode* + ICD*)
• Low vacuum
- 1.4 nm at 30 kV (SE)
- 2.5 nm at 30 kV (BSE)
- 3.0 nm at 3 kV (SE)
• Extended vacuum mode (ESEM)
- 1.4 nm at 30 kV (SE)