摆度
第14楼2014/10/24
Quantification in XPS is basically just a calculation related with some factors (sensitivity factors...etc) and most importantly parameter is "AREA of a peak".
The "???" in the table is trying to say the presence of those elements are in doubt but "maybe" appear. Because the peaks like you said are not obvious at all. But software somehow detects it but since its so low and peak not obvious so a "???" come up to remind users maybe some further judgment is required to believe if it is real peak or not.