怪侠一把刀
第37楼2007/01/09
感谢楼上的兄弟的支持!
把问题再次整理下
Q: What is the message 'No emission current' or MS SPEC fault #8 appears during measurement or tuning?
Please perform the following checks.
1. In the Edit MS Params of the Manual Tune screen: Click the "Scan" or "Profile" button and check whether the error message appears again.
2. Next, change the filament from the screen. Click the "Scan" or "Profile" button and check whether a peak appears.
3a. If a peak appears: Close the Edit MS Params screen and use the "File" menu to save the tune parameters. You can now perform measurement after doing an autotune.
Change the filament the next time you perform ion source cleaning.
3b. If no peak appears and an error message is output: Vent the system and check whether the two filaments are broken and that the ion source cable is connected correctly. If a filament is broken, replace both the filaments.
Check that the two cables connecting the analyzer unit to the electronics are fully inserted. Side board control cable (wide ribbon cable) Source power cable (thick cable on the near side)
Try generating a vacuum again.
If there is no improvement, please contact the 啊 customer service center
如下操作
1. 在手动tune中编辑MS参数界面:点击scan和Profile查看是否有报错信息再次出现
2. 下一步,使用备用灯丝,再点击scan和Profile看是否有峰出现
3. A:如果有峰出现,关闭MS参数编辑界面,使用file菜单保存tune参数文件,进行调谐后可以检测进样。下一次清洗离子源的时候更换灯丝
B:如果没有峰,出现报错信息:放空系统,检查是否两个灯丝完好。离子源引线是否接好。如果一根灯丝烧掉,两个灯丝全部更换?
4. 检查引线是否接牢接好
重新抽真空,如果没有改善,联系客服中心
怪侠一把刀
第39楼2007/02/04
答案:解决方法如下:
• The following are possible causes for the observed symptoms. Please check.
- Has the diffusion pump or turbo pump stopped or does not satisfy the standard operating conditions?*
- Is the temperature sensor is not connected?*
- Is the temperature sensor is not working?*
- Is the source power supply cable is not connected to the side board?*
- Is the MSD electronics unit working correctly?
* These situations cause an error message to appear.
1. Check the vacuum state. > See separate item. 2. Try re-connecting the cable for the temperature heater sensor.
Cable insulated by pairs of green beads. Pair of white fabric-skinned cables
If there is no improvement, replace the temperature sensor or contact Axx customer service.