微区XRF（X射线分析显微镜）用于电子工业的品质控制和缺陷分析

微区XRF（X射线分析显微镜）用于电子工业的品质控制和缺陷分析 The unrivalled 10 μm spatial resolution of the XGT-5000 combined with its high sensitivity to the transition elements makes this energy dispersive x-ray fluorescence (EDXRF) system an ideal tool for fast and accurate analysis of electronic components during the different steps of production (R&D, trouble shooting, quality control, WEEE/RoHS directive compliance). The high intensity x-ray beam used gives much deeper penetration depths than those achieved with SEM-EDX (scanning electron microscopy with energy dispersive x-ray analysis). The penetrative analysis of XRF associated with transmitted x-ray imaging allows the non-destructive analysis of chips embedded within resin. Moreover the beam emerging from the mono-capillary x-ray guide tube (the XGT) has optimised collimation which preserves the 10 μm spatial resolution even if the sample is not in perfect focus. 如果积分不足，请发邮件至info-sci.cn@horiba.com，直接索取更多应用案例