微区XRF（X射线分析显微镜）对金属薄膜的快速厚度测量

微区XRF（X射线分析显微镜）对金属薄膜的快速厚度测量 Energy dispersive X-ray fluorescence(EDXRF) is an ideal technique for fast and non-destructive elemental characterisation of materials. The XGT-5000 combines this with microscopic spatial resolution, offering unique high intensity x-ray beams with diameters ranging from 1.2mm down to 10um. Accurate quantitative and qualitative analysis are possi ble using single pint analysis, whilst elemental imaging results in detailed distribution maps for specified elements.Furthermore, an additional scintillation detector gives access to transmitted x-ray imaging, revealing inernal structures, even of components embedded in resin. 请发邮件至info-sci.cn@horiba.com，直接索取更多应用案例