《中国生物医学工程学报》等离子体预处理对316L不锈钢-EVAL界面结合强度的影响

【中文摘要】 研究了Ar、N2及Ar+N2等离子体预处理对316L不锈钢与其表面EVAL涂层之间结合强度的影响。采用全反射FTIR、AFM测试研究了等离子体预处理前后316L不锈钢表面物化状态的变化;利用X-光电子能谱研究了316L不锈钢与EVAL涂层之间的界面反应。研究结果表明:Ar、N2及Ar+N2等离子体预处理后,316L不锈钢与EVAL涂层之间的结合强度分别高达0.92MPa、1.2MPa、1.5MPa(未经处理的试样为0.15MPa)。全反射FTIR和AFM分析结果表明Ar、N2等离子体均对基体表面有较好的清洗作用,Ar等离子体对基体表面具有较强的轰击、刻蚀作用。XPS测试表明EVAL在经Ar等离子体处理的基体表面仅以物理吸附状态存在,推测与N2等离子体处理的基体之间形成了metal-N-O形式的氢键结合。 【英文摘要】 In order to enhance the adhesion of EVAL on 316L stainless steel,the substrate was pretreated by low frequency RF plasma.The influence of different gas plasma(Ar plasma,N_2 plasma,two steps including Ar and N_2 plasma) on the bonding strength was investigated.The results indicated that the plasma pretreatment could significantly improve the adhesion of EVAL on substrate and the bonding strength of EVAL on the substrate pretreated by Ar plasma,N_2 plasma,and two steps plasma reached 0.92MPa,1.2MPa,1.5MPa,res...