用户论文(2006)：<b>《真空科学与技术学》</b>STM脉冲电压极性对材料微细加工影响的研究

【中文摘要】 利用扫描隧道显微镜(STM)可对不同材料表面进行纳米级微细加工。在选取高定向裂解石墨(HOPG)和有机电双稳材料Ag-TCNQ分别进行直接刻蚀和电学改性的研究中,发现STM脉冲电压极性对实验结果有影响。本文为此构建了物理模型,分析表明在不同极性的脉冲电压下,分别主要呈现电场效应或电子轰击效应。需要针对具体材料的具体加工要求,选择STM相应的脉冲电压极性。 【英文摘要】 Nano-machining of highly orientated pyrolitic graphite(HOPG) and Ag-TCNQ-an organic electrical bistable material-was performed with a scanning tunneling microscope(STM)in our study of lithography.We found that the pulse polarity applied to the STM significantly affects the nanostructures fabricated.Possible mechanisms,such as electron heating,electron tunneling and field emission,were tentatively proposed and discussed.