电子束模拟软件Casino

Casino是一个比较经典的Monte Carlo模拟软件，用来模拟电子在固体中的作用过程。可以模拟背散射电子的统计分布，能量损失，电子束作用深度等。 使用此软件可以估计不同能量的电子束的对不同样品的穿透深度，这一功能非常实用。大家都知道，如果用较高能量的电子束去分析薄样品，得到的信号很可能大部分来自衬底而非真正的样品。 This program is designed to simulate a large amount of electron trajectory in a solid of your choice. The main idea is to simulate enough electron trajectory to represent the condition used to image structures in a scanning electron microscope (SEM). Thus it is possible to predict theoretically the signals observed in the SEM. This Monte Carlo program use different models to simulate the interaction of electrons with a solid. For now, the versions 2.0 of CASINO produce the following signals : Backscattered coefficient and X-Ray. It also handles those geometry : muti-layers samples and grain boundary.