AFM与SEM：高分辨率表征手段上的互补

SEM and AFM are complementary techniques that provide a more complete representation of a surface when used together than if each were the only technique available. These techniques overlap in their capabilities to provide nanometer scale lateral information. However, they deviate in the fact that the AFM can provide measurements in all three dimensions, including height information with a vertical resolution of <0.5Å, whereas the SEM has the ability to image very rough samples due to its large depth of field and large lateral field of view......