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Phase Modulated Spectroscopic Ellipsometry is an excellent technique for the highly accurate characterization of complete TFT-LCD device. The technique allows the determination of film thickness, optical properties but also more complex properties such as graded or anisotropic layers and effect of dopants. In the flat panel industry the pressure to reduce manufacturing costs is and reliable metrology tools are required to control the different steps of the process. Spectroscopic ellipsometry is a non destructive technique which presents advanced capabilities and proven reliability tailored for qualification and on-line production control.