其他null检测 | 使用相位调制型椭圆偏振光谱仪表征III-V族半导体-HORIBA（中国）

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应用领域	半导体
检测样本	其他
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The high accuracy characterisation of the thicknesses and optical properties of III-V semiconductors has been successfully performed using the UVISEL Spectroscopic Phase Modulated Ellipsometer. Moreover, Spectroscopic Ellipsometry can be applied to characterise multilayers of miscellaneous binary, ternary semiconductors and alloys (MQW structure, PIN structure, pump laser, laser semiconductor,…).

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HORIBA UVISEL Plus研究级经典型椭偏仪
型号：UVISEL

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方案详情

The high accuracy characterisation of the thicknesses and optical properties of III-V semiconductors has been successfully performed using the UVISEL Spectroscopic Phase Modulated Ellipsometer. Moreover, Spectroscopic Ellipsometry can be applied to characterise multilayers of miscellaneous binary, ternary semiconductors and alloys (MQW structure, PIN structure, pump laser, laser semiconductor,…).

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HORIBA（中国）

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