用户论文(2005)：喷雾热解法制备SnO2∶F+Sb薄膜的结构及性能研究

【中文摘要】 采用喷雾热解法在玻璃基板上制备了SnO2∶F+Sb薄膜,对薄膜的结构及性能进行了研究。用STM对薄膜表面进行表征,发现薄膜表面光滑平整,粗糙度Ra为16.283nm。四探针测试仪测定薄膜方阻为60Ω/□,电阻率为2.1×10-3Ω.cm。用XRD表征薄膜结构,薄膜为四方相多晶SnO2结构,说明掺杂没有该变薄膜结构。对薄膜的光学性能进行了测试,可见光透过率达到80%,在2500nm处的中远红外区反射率由镀膜前的6%上升到36%。按国家标准测试了镀膜玻璃耐酸碱稳定性,实验前后薄膜的可见光透过率变化<3%,符合国家标准。同时本研究还对镀膜玻璃的保温性能进行了测试,结果表明本实验制备的镀膜玻璃具有较好的保温性能。 【英文摘要】 Fabricated SnO_2∶F+Sb thin films on glass substrate by spray pyrolysis.The STM result showed that the thin films were smooth and the roughness R_a was 16.283nm;XRD analysis indicate that the thin films were SnO_2 with tetrahedral structure.The visible transmission of thin film was up to 80%;it's infrared reflectivity in 2500nm was 36% and transmission was 5%. The sheet resistance was 65～86Ω/□ and the resistivity was 2.1×10~(-3)Ω·cm.The coated glasses have fine performances of heat preservation,and the films...

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北京均方理化科技研究所

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