Geometric Considerations of Surface Profilers and Pivoting Step Measurers

2008-06-06 11:34 下载量：133

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In recent years, stylus-based surface measuring instruments have broadened in application to become among the most widely used general purpose instruments in advanced R&D and manufacturing. These instruments are popular because they are easy to use, have high lateral resolution (less than 500 Angstroms) and extraordinary vertical resolution (less than 1 Angstrom). This performance can be achieved with traceability to international standards. Commercially available stylus instruments break down into two clearly defined classes: Surface Profilers and Pivoting Step Measurers. The basic geometry of the two classes differentiates them. This paper will explore the fundamental geometries of the two instrument concepts so that a prospective user can determine which instrument is suitable for existing and future measurement problems.

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江莱生物科技有限公司

中级会员 | 第2年

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