资料摘要
资料下载Stylus profilers are often used to cost effectively measure step heights, bow, planarity, and roughness on the surface of MEMS. The AFP, exclusively available from Veeco, combines the long scan capability of the stylus profiler with the imaging resolution of the AFM, enabling measurement combinations on MEMS that were previously impossible to make with any single metrology tool. Stylus profiling and AFP provide the longest continuous scans of a surface, up to 200mm and 100mm, respectively. Veeco’s Dektak Series stylus profilers and Series Vx AFP benefit from ongoing technology transfer between the various metrology product lines of Veeco. The Dektak Series stylus profilers use the same data analysis software as Veeco’s NT Series Optical Profilers, streamlining the comparison of measurements made on MEMS with these two very different technologies. The AFP uses not only the Veeco NanoScope AFM image analysis software to make measurements on 3-D images it captures, but also core AFM hardware to scan and capture profiles and images of MEMS wafers and devices with unparalleled resolution.
文献贡献者
Veeco9月24号上海光学干涉表征技术研讨会邀请函
简介：全球领先测量仪器制造商美国Veeco公司，将于“2008中国国际轴承及其专用设备展览会”同期举办光学干涉表征技术研讨会。
NanoScope软件上的力谱数据分析
简介：The atomic force microscope (AFM) offers extraordinarily high resolution in force measurement applications, routinely yielding useful data down to the thermal noise floor of the cantilever, typically about 10pN. This along with the ease with which it is applied to many biological systems has made it a popular tool for studying such things as the specific interactions between biomolecules, the forces required to stretch polymeric molecules, and the forces that stabilize proteins. These sorts of applications have come to be collectively referred to as “force spectroscopy” applications.
E-Scope产品手册
简介：EnviroScope SPM 结合了模式化的环境控制器、密封样品池和多种成像模式于一体，为科学研究和工业应用提供了出色的应用适应性。系统带有高真空、气体和液体倾注和交换附件以及加热附件，环境控制池可以在一系列复杂的环境变化条件下观察样品的反应。基于工业标准的 Dimension 扫描头包含有压电扫描管、激光和四相限光学检测器，以确保成像效果和数据可靠性。
电化学扫描探针显微镜产品手册
简介：Veeco公司提供多种功能强大的电化学系统，它们的高分辨率、多适应性和易操作等特点使之适用于研究各种实时和原位的电化学过程。每种系统都是使用世界领先的DI NanoScope控制器和几种可供选择的SPM平台，其中包括高分辨率的DI MultiMode平台。 每种配置都具备 bipotentiostat / galvanostat，一个或多个液体池，以及电极附件。其中，电化学扫描隧道显微镜（ECSTM）能够在电化学控制下的溶液中对电极表面进行原子和分子级分辨率的扫描隧道成像；电化学原子力显微镜 （ECAFM） 可以在电化学控制下的溶液中对电极表面上进行纳米分辨率的成像；新型的扫描电化学电势显微镜使用Veeco独有的专利技术，可以在纳米分辨率上测量双电层的电势分布和成像电极表面的的电势和形貌。
D5000产品手册
简介：Dimension 5000 SPM具有对大样品的自动成像能力，使之在半导体和数据存储设备的制造过程中广泛使用，它能够测量直径达350 mm的样品上测量100多个区域。它具有原子力显微镜和扫描隧道显微镜的全部配置，可以在三维尺寸上探测缺陷、测量表面粗糙度和其它特征，测量过程对样品无损伤并且无需对样品进行预处理和修饰。
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