Experimental challenges for approaching local strain determination

2008/03/06   下载量: 115

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In this paper, the Raman intensity enhancement induced by nanoprobes (metal particles and metallized tips) in the vicinity of a strained silicon sample surface is reported. For silver nanoparticles deposited directly onto silicon, high enhancements in the vicinity of particles were observed. Furthermore, metallized tips were scanned inside the spot of a laser used for the Raman measurements. Both silver coated and pure silver tips, mounted to a tuning fork, indicated high Raman signal enhancement for optimized tip position within the laser spot. Atomic Force Microscopy (AFM) scanning on a structured sample was conducted to investigate the stability of these tips. Focused Ion Beam (FIB) milling was utilized to refine and to re-sharpen pure silver tips after the measurements. Complementary measurements were performed using pure tungsten tips. Because of the high hardness of W wires, a special pre-etch technique was applied.

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