型号: | NanoLR200 |
产地: | 美国 |
品牌: | MCL关注纳米 |
评分: |
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Features
![]() | Typical Applications
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Product Description |
The Nano-LR200 is designed to provide long range, single axis translation with an absolute minimum of out-of-axis motion. The unique design of the Nano- LR200 produces less than 5 nm of out-of-plane motion; measured over the entire moving platform throughout the 200 μm range of motion. The Nano-LR200 sets the highest level of single axis precision and positioning performance. Internal position sensors utilizing proprietary PicoQ? technology provide absolute, repeatable position measurement with sub-nanometer accuracy under closed loop control. The Nano-LR200 is ideally suited for applications that require extreme parallelism, such as metrology, AFM and MEMS.![]() |
Technical Specifications | |
Range of motion (X) | 200 μm |
Resolution | 0.4 nm |
Resonant Frequency | 500 Hz ±20% |
Resonant Frequency (100g load) | 200 Hz ±20% |
Stiffness | 0.2 N/μm |
θ roll, θ pitch (typical) | ≤0.3 μrad |
θ yaw (typical) | ≤0.3 μrad |
Recommended max. load (horizontal)* | 0.5 kg |
Recommended max. load (vertical)* | 0.2 kg |
Body Material | Al |
Controller | Nano-Drive? |
* Larger load requirements should be discussed with our engineering staff. |
Additional Information | |
Nano-LR200 Drawing![]() | Nano-LR200 Catalog Pages![]() |
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