MCL 纳米线性位移台LR200

MCL 纳米线性位移台LR200

参考价：面议
型号： Nano­LR200
产地： 美国
品牌： MCL关注纳米
评分：
核心参数
北京欧兰科技发展有限公司
金牌会员 丨 17年
关注展位 全部仪器
展位推荐 更多
产品详情


Features

  • Long range single axis motion: 200 μm

  • Less than 5 nm out of plane motion

  • Low profile design

  • Closed loop control



Typical Applications

  • Surface metrology

  • Wafer scanning and alignment

  • Optical alignment



Product Description

The Nano-LR200 is designed to provide long range, single axis translation with an absolute minimum of out-of-axis motion. The unique design of the Nano- LR200 produces less than 5 nm of out-of-plane motion; measured over the entire moving platform throughout the 200 μm range of motion. The Nano-LR200 sets the highest level of single axis precision and positioning performance. Internal position sensors utilizing proprietary PicoQ? technology provide absolute, repeatable position measurement with sub-nanometer accuracy under closed loop control. The Nano-LR200 is ideally suited for applications that require extreme parallelism, such as metrology, AFM and MEMS.



Technical Specifications

Range of motion (X)200 μm
Resolution
0.4 nm
Resonant Frequency500 Hz ±20%
Resonant Frequency (100g load)200 Hz ±20%
Stiffness0.2 N/μm
θ roll, θ pitch (typical)≤0.3 μrad
θ yaw (typical)≤0.3 μrad
Recommended max. load (horizontal)*0.5 kg
Recommended max. load (vertical)*0.2 kg
Body MaterialAl
ControllerNano-Drive?
* Larger load requirements should be discussed with our engineering staff.



Additional Information

Nano-LR200 Drawing

Nano-LR200 Catalog Pages



Related Products

  • Nano-OP Series

  • Nano-YT500

  • Accessories

  • Nano-Drive?


北京欧兰科技发展有限公司为您提供MCL关注纳米MCL 纳米线性位移台LR200Nano­LR200，MCL关注纳米Nano­LR200产地为美国，属于位移台，除了MCL 纳米线性位移台LR200的参数、价格、型号、原理等信息外，还可为您提供MCL 压电马达驱动超高真空兼容位移台、MCL 纳米测量 纳米计、MCL 原子力学音叉,欧兰科技客服电话400-860-5168转1446，售前、售后均可联系。

MCL关注纳米位移台Nano­LR200的工作原理介绍位移台Nano­LR200的使用方法?MCL关注纳米Nano­LR200多少钱一台?位移台Nano­LR200可以检测什么？位移台Nano­LR200使用的注意事项？MCL关注纳米Nano­LR200的说明书有吗？MCL关注纳米位移台Nano­LR200的操作规程有吗？MCL关注纳米位移台Nano­LR200报价含票含运吗？MCL关注纳米Nano­LR200有现货吗？
相关仪器 更多

相关产品

北京欧兰科技发展有限公司为您提供MCL关注纳米MCL 纳米线性位移台LR200Nano­LR200，MCL关注纳米Nano­LR200产地为美国，属于位移台，除了MCL 纳米线性位移台LR200的参数、价格、型号、原理等信息外，还可为您提供MCL 压电马达驱动超高真空兼容位移台、MCL 纳米测量 纳米计、MCL 原子力学音叉,欧兰科技客服电话400-860-5168转1446，售前、售后均可联系。
Business information
工商信息 信息已认证
当前位置： 欧兰科技 仪器 MCL 纳米线性位移台LR200

关注

拨打电话

留言咨询