方案摘要
方案下载| 应用领域 | |
| 检测样本 | |
| 检测项目 | |
| 参考标准 |
This App Note demonstrates the capabilities of the Rigaku NEX CG EDXRF analyzer for the measurement of thin film thickness (Tox) applied to semiconductor wafers. Simple 2-point empirical calibrations are used for SiO2, AlSi, Ti, TiN, Pt, AlCu, and BPSG single layer films on silicon substrates for use in quality control in the semiconductor industry.
文献贡献者
钢铁分析技术进步与展望
聚乙烯中的氯和ROHS元素报告
油品仪器分析的现状和发展趋势
相关产品
关注
拨打电话
留言咨询
