WinWInTec白光干涉形貌仪

WinWInTec白光干涉形貌仪

  • 型号:SmartWLI extended
  • 产地:德国
  • 品牌:
  • 性质:
  • 报价:10万-20万

核心参数

产品详情

应用领域:

Wafer晶片,微流控系统,金刚石工具,汽车气缸,光学镜片,金属表面,机身外观(汽车),粗糙度标准片。

详情见产品手册。

technology measurement principle:

white-light interferometer

scanning device:

Piezo positioning system

system parameters objectives:

 

up to 4 objectives

manual exchangeable / automated detection

max. range Z axis:

400 μm

topography reproducibility*:

< 0.15 nm

digitalization:

up to 0.01 pm

scanning speed:

 

approx. 11.4 – 218 μm/s - full camera resolution up to 400 μm/s – ROI

0.4 μm step height:

< 1 nm (1-σ reproducibility)

12 μm step height:

< 3 nm (1-σ reproducibility)

100 μm step height:

< 20 nm (1-σ reproducibility)

smooth surfaces:

up to 53° (max. slope)

rough surfaces:

up to 90° (max. slope)

camera pixel:

1920 x 1200

speed full resolution:

169 Hz

speed subsampling:

533 Hz (960 x 600 pixel)

speed ROI:

up to 3.2 kHz

optional 5x objective field of view:

3.7 x 2.3 mm2

point spacing:

1.9 μm

optional 10x objective field of view:

1.8 x 1.2 mm2

point spacing:

0.96 μm

optional 20x objective field of view:

0.91 x 0.58 mm2

point spacing:

0.48 μm

optional 50x objective field of view:

0.37 x 0.23 mm2

point spacing:

0.19 μm

optional 100x objective field of view:

0.18 x 0.12 mm2

point spacing:

0.1 μm

optional 115x objective** field of view:

0.16 x 0.1 mm2

point spacing:

0.08 μm

control unit

industrial 19” rack housing

piezo controller LED light controller

motorized XY positioning system controller (optional)

PC, Windows10 pro, Core I5, 16 GB RAM, 500 GB SSD, CUDA® compatible graphic board for the fast 3d calculation with installed software documentation factory acceptance protocol

CE declaration manuals

*Sq/2 – profile difference of 2 scans, EPSI, single scan, without profile averaging, laboratory conditions, 1 million points after 3x3 denoising filter

**Olympus 100x WLI objective – the mentioned magnification is calculated in relation to the 100x Nikon objective


注:对于医疗器械类产品,请先查证核实企业经营资质和医疗器械产品注册证情况

售后服务

  • 免费上门安装:是
  • 保修期:1年
  • 是否可延长保修期:是
  • 保内维修承诺:免费维修,免费更换部件
  • 报修承诺:3小时内响应
  • 免费仪器保养:半年一次
  • 免费培训:5人次
  • 现场技术咨询:有

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