产品详情
1. Characteristics
ZEP520A is high performance positive EB resists which show high resolution, high sensitivity and dry etch resistance.
They are suitable for various EB processes.
(1) Resolution
Shows high resolution and rectangle pattern profile.
(2) Resistance to dry etching
Shows high dry etch resistance and they are almost equivalent to that of positive photoresists generally used.
(3) Sensitivity
Shows high sensitivity.
2. Properties
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7. Spin Curve
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8.Dependence on Prebake Temperature
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9.Dependence on Development Temperature
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9.Dependence on Development Time
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10. Examples of application
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11. Dry Etching Resistance
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12. Example of Process Conditions
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13.Handling Precaution
(1) Flammable Liquid.
(2) Harmful by inhalation.
(3) Avoid contact with skin and eyes.
CAUTION: Open carefully. Use in well ventilated area. In case of contact with skin and eyes, rinse immediately with plenty of water for 15 minutes and get medical attention. In case of fire use Alcohol form CO2 or dry chemical, never use water.
STORAGE: Keep capped and away from oxidants, sparks and open flame. Store at cool[32?F(0?C)～77?F(25?C)] and dark place. Use in clean room.
14. Appendix
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深圳市蓝星宇电子科技有限公司为您提供ZEP520A 电子束光刻胶 ，nullZEP520A 产地为日本，属于其他，除了ZEP520A 电子束光刻胶 的参数、价格、型号、原理等信息外，还可为您提供更多其他,蓝星宇客服电话400-860-5168转4527，售前、售后均可联系。
工商信息
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