ISO14644分级
|
最大允许浓度极限(颗粒数/m3)
|
FS 209E
净化判定 |
|||||
≥0.1μm
|
≥0.2μm
|
≥0.3μm
|
≥0.5μm
|
≥1.0μm
|
≥5.0μm
|
||
ISO1级
|
10
|
2
|
|
|
|
|
|
ISO2级
|
100
|
24
|
10
|
4
|
|
|
|
ISO3级
|
1,000
|
237
|
102
|
35
|
8
|
|
1级
|
ISO4级
|
10,000
|
2,370
|
1,020
|
352
|
83
|
|
10级
|
ISO5级
|
100,000
|
23,700
|
10,200
|
3,520
|
832
|
29
|
100级
|
ISO6级
|
1,000,000
|
237,000
|
102,000
|
35,200
|
8,320
|
293
|
1,000级
|
ISO7级
|
|
|
|
352,000
|
83,200
|
2,930
|
10,000级
|
ISO8级
|
|
|
|
3,520,000
|
832,000
|
29,300
|
100,000级
|
ISO9级
|
|
|
|
35,200,000
|
8,320,000
|
293,000
|
|
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