Technical Specifications |
Ranges of motion (Nano-Align5-100) | 100 x 100 x 100 μm x 1.1 mrad (θX) x 1.5 mrad (θY) |
Ranges of motion (Nano-Align5-200) | 200 x 200 x 200 μm x 2.3 mrad (θX) x 3.0 mrad (θY) |
Ranges of motion (Nano-Align5-300) | 300 x 300 x 300 μm x 3.3 mrad (θX) x 4.5 mrad (θY) |
Resolution (Nano-Align5-100)
| 0.2 nm (XYZ), 2.2 nrad (θX), 3.0 nrad (θY) |
Resolution (Nano-Align5-200) | 0.4 nm (XYZ), 4.6 nrad (θX), 6.0 nrad (θY) |
Resolution (Nano-Align5-300) | 0.6 nm (XYZ), 6.6 nrad (θX), 9.0 nrad (θY) |
Resonant Frequencies |
|
X axis (100/200/300 μm) | 450/400/350 Hz ±20% |
Y axis (100/200/300 μm) | 350/300/250 Hz ±20% |
Z axis (100/200/300 μm) | 450/350/250 Hz ±20% |
Stiffness | 1.0 N/μm |
Recommended max. load (horizontal)* | 0.5 kg |
Recommended max. load (vertical)* | 0.2 kg |
Body Material | Aluminum (all models), Invar or Titanium (100 or 200μm only) |
Controller | Nano-Drive® |
* Larger load requirements should be discussed with our engineering staff. |