仪器对比
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钨灯丝
3nm
800000倍
0.1 - 30kV
更多资料请直接联系我们进行咨询：
1) Resolution 3.0nm @ 30KeV, Possible Low KV Image Acquisition (from 0.2KV)
2) Magnification 10 - Max. 200,000X
3) Auto-Function Auto-Focus / Stigmator/ Contrast & Brightness/ Gun Alignment / Wobble and etc.
4) Stage 5-axis STAGE (X, Y, R, Z, T)
5) Stage Stroke 40 / 40 / 40mm (X / Y / Z) , 0~60? Tilt / 360? Endless
mage Shift(150 X-Y), Image Rotation 360?
6) Chamber Volume Φ210mm X 180mm (H)
7) Vacuum System Rotary Pump + TMP (80liter/sec)
8) Pixel Resolution 4096 X 3072 (Max.)
9) Analysis S/W Image Enhancement/ Multi-Focus / Tiling / 3-D View / AOI / etc.
10) Option Port 3ea; SE(1), EDS(1), BSE Port
1) Compact design with a wheeled chassis for easy transport
2) Allow Low KV Image(from 1KV) for non-conductive sample
3) Equipped with ET-BSE Detector(SE & BSE Image Acquisition)
Possible Image observation on Non-Coating condition
4) Competitive SEM with economic price
5) Minimized Installation Space & Utility;540(W)X570(D)X1500(H)mm3
6) Equipped with powerful "Analysis S/W" and "Measurement Tool"
7) User-Friendly operating system
9) Low Vacuum Mode supply
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