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features:
? Hartmann wavefront sensor for coherent and incoherent radiation
?Compact and self-supporting
?Achromatic
?Actinic characterization of: EUVL plasma sources
Free Electron Lasers
HHG beams
?Real-time optics adjustment
?Single-pulse repeatability λ/116 (wrms) for EUV (λ =13.5 nm)
Specifications:
?Wavelength range< 1 nm... 60 nm (quantumconverter)
?Field of view 9.0mm x 6.7 mm(larger on request)
?Dynamic range14 bit
?Hartmann plate precision pinholes ?75μm, 250μm pitch
?Tilt range±10°
?x/y translation range±10mm
?UHV compatiblemounted on CF63 flange
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