刻蚀光栅
一、标准的刻蚀光栅规格:
刻线/mm | 闪耀波长nm | 闪耀角度 | 色散nm/mr | 12.7x12.7x 6 | 25x25x 6 | 25x25x 9.5 | 30x30x 9.5 | 50x50x 9.5 | 12.5x25x 6 | 12.5x25x 9.5 | 25x50x 9.5 |
120 | 12000 | 46 3' | 5.8 | 3-4112 | 3-8112 | 3-2112 | 3-3112 | 3-5112 | 3-6112 | 3-1112 | 3-7112 |
150 | 500 | 2 8' | 6.66 | 3-4155 | 3-8155 | 3-2155 | 3-3155 | 3-5155 | 3-6155 | 3-1155 | 3-7155 |
300 | 300 | 2 34' | 3.33 | 3-4330 | 3-8330 | 3-2330 | 3-3330 | 3-5330 | 3-6330 | 3-1330 | 3-7330 |
300 | 500 | 4 18' | 3.32 | 3-4350 | 3-8350 | 3-2350 | 3-3350 | 3-5350 | 3-6350 | 3-1350 | 3-7350 |
300 | 1000 | 8 36' | 3.3 | 3-4310 | 3-8310 | 3-2310 | 3-3310 | 3-5310 | 3-6310 | 3-1310 | 3-7310 |
300 | 2000 | 17 27' | 3.18 | 3-4320 | 3-8320 | 3-2320 | 3-3320 | 3-5320 | 3-6320 | 3-1320 | 3-7320 |
300 | 4000 | 36 52' | 2.67 | 3-4340 | 3-8340 | 3-2340 | 3-3340 | 3-5340 | 3-6340 | 3-1340 | 3-7340 |
600 | 300 | 5 9' | 1.66 | 3-4630 | 3-8630 | 3-2630 | 3-3630 | 3-5630 | 3-6630 | 3-1630 | 3-7630 |
600 | 400 | 6 53' | 1.66 | 3-4640 | 3-8640 | 3-2640 | 3-3640 | 3-5640 | 3-6640 | 3-1640 | 3-7640 |
600 | 500 | 8 37' | 1.65 | 3-4650 | 3-8650 | 3-2650 | 3-3650 | 3-5650 | 3-6650 | 3-1650 | 3-7650 |
600 | 750 | 13 0' | 1.62 | 3-4675 | 3-8675 | 3-2675 | 3-3675 | 3-5675 | 3-6675 | 3-1675 | 3-7675 |
600 | 1000 | 17 27' | 1.59 | 3-4610 | 3-8610 | 3-2610 | 3-3610 | 3-5610 | 3-6610 | 3-1610 | 3-7610 |
600 | 1250 | 22 1' | 1.55 | 3-4612 | 3-8612 | 3-2612 | 3-3612 | 3-5612 | 3-6612 | 3-1612 | 3-7612 |
600 | 1600 | 28 41' | 1.46 | 3-4616 | 3-8616 | 3-2616 | 3-3616 | 3-5616 | 3-6616 | 3-1616 | 3-7616 |
830 | 800 | 19 23' | 1.14 | 3-4880 | 3-8880 | 3-2880 | 3-3880 | 3-5880 | 3-6880 | 3-1880 | 3-7880 |
830 | 1200 | 29 52' | 1.05 | 3-4812 | 3-8812 | 3-2812 | 3-3812 | 3-5812 | 3-6812 | 3-1812 | 3-7812 |
900 | 500 | 13 0' | 1.08 | 3-4712 | 3-8712 | 3-2712 | 3-3712 | 3-5712 | 3-6712 | 3-1712 | 3-7712 |
1200 | 250 | 8 37' | 0.82 | 3-4125 | 3-8125 | 3-2125 | 3-3125 | 3-5125 | 3-6125 | 3-1125 | 3-7125 |
1200 | 300 | 10 22' | 0.82 | 3-4130 | 3-8130 | 3-2130 | 3-3130 | 3-5130 | 3-6130 | 3-1130 | 3-7130 |
1200 | 400 | 13 53' | 0.81 | 3-4140 | 3-8140 | 3-2140 | 3-3140 | 3-5140 | 3-6140 | 3-1140 | 3-7140 |
1200 | 500 | 17 27' | 0.8 | 3-4150 | 3-8150 | 3-2150 | 3-3150 | 3-5150 | 3-6150 | 3-1150 | 3-7150 |
1200 | 750 | 26 44' | 0.74 | 3-4175 | 3-8175 | 3-2175 | 3-3175 | 3-5175 | 3-6175 | 3-1175 | 3-7175 |
1200 | 1000 | 36 52' | 0.67 | 3-4110 | 3-8110 | 3-2110 | 3-3110 | 3-5110 | 3-6110 | 3-1110 | 3-7110 |
1800 | 240 | 12 29' | 0.54 | 3-4162 | 3-8162 | 3-2162 | 3-3162 | 3-5162 | 3-6162 | 3-1162 | 3-7162 |
1800 | 500 | 26 44' | 0.5 | 3-4185 | 3-8185 | 3-2185 | 3-3185 | 3-5185 | 3-6185 | 3-1185 | 3-7185 |
二、高分辨率的刻蚀光栅规格:
刻线/mm | 闪耀波长nm | 闪耀角度 | 色散mm/mr | 12.7x12.7 x 6 | 25x25 x 6 | 25x25 x 9.5 | 30x30 x 9.5 | 50x50 x 9.5 | 12.5x25 x 6 | 12.5x25 x 9.5 | 25x50 x 9.5 |
120 | 12000 | 46 3' | 5.78 | 3-4219 | 3-8219 | 3-2219 | 3-3219 | 3-5219 | 3-6219 | 3-1219 | 3-7219 |
150 | 500 | 2 8' | 6.66 | 3-4559 | 3-8559 | 3-2559 | 3-3559 | 3-5559 | 3-6559 | 3-1559 | 3-7559 |
300 | 300 | 2 34' | 3.33 | 3-4339 | 3-8339 | 3-2339 | 3-3339 | 3-5339 | 3-6339 | 3-1339 | 3-7339 |
300 | 500 | 4 18' | 3.32 | 3-4359 | 3-8359 | 3-2359 | 3-3359 | 3-5359 | 3-6359 | 3-1359 | 3-7359 |
300 | 1000 | 8 36' | 3.3 | 3-4229 | 3-8229 | 3-2229 | 3-3229 | 3-5229 | 3-6229 | 3-1229 | 3-7229 |
300 | 2000 | 17 27' | 3.18 | 3-4329 | 3-8329 | 3-2329 | 3-3329 | 3-5329 | 3-6329 | 3-1329 | 3-7329 |
300 | 4000 | 36 52' | 2.67 | 3-4349 | 3-8349 | 3-2349 | 3-3349 | 3-5349 | 3-6349 | 3-1349 | 3-7349 |
600 | 300 | 5 9' | 1.66 | 3-4639 | 3-8639 | 3-2639 | 3-3639 | 3-5639 | 3-6639 | 3-1639 | 3-7639 |
600 | 400 | 6 53' | 1.66 | 3-4649 | 3-8649 | 3-2649 | 3-3649 | 3-5649 | 3-6649 | 3-1649 | 3-7649 |
600 | 500 | 8 37' | 1.65 | 3-4659 | 3-8659 | 3-2659 | 3-3659 | 3-5659 | 3-6659 | 3-1659 | 3-7659 |
600 | 750 | 13 0' | 1.62 | 3-4679 | 3-8679 | 3-2679 | 3-3679 | 3-5679 | 3-6679 | 3-1679 | 3-7679 |
600 | 1000 | 17 27' | 1.59 | 3-4619 | 3-8619 | 3-2619 | 3-3619 | 3-5619 | 3-6619 | 3-1619 | 3-7619 |
600 | 1250 | 22 1' | 1.55 | 3-4609 | 3-8609 | 3-2609 | 3-3609 | 3-5609 | 3-6609 | 3-1609 | 3-7609 |
600 | 1600 | 28 41' | 1.46 | 3-4669 | 3-8669 | 3-2669 | 3-3669 | 3-5669 | 3-6669 | 3-1669 | 3-7669 |
830 | 800 | 19 23' | 1.14 | 3-4889 | 3-8889 | 3-2889 | 3-3889 | 3-5889 | 3-6889 | 3-1889 | 3-7889 |
830 | 1200 | 29 52' | 1.05 | 3-4819 | 3-8819 | 3-2819 | 3-3819 | 3-5819 | 3-6819 | 3-1819 | 3-7819 |
900 | 500 | 13 0' | 1.08 | 3-4719 | 3-8719 | 3-2719 | 3-3719 | 3-5719 | 3-6719 | 3-1719 | 3-7719 |
1200 | 250 | 8 37' | 0.82 | 3-4129 | 3-8129 | 3-2129 | 3-3129 | 3-5129 | 3-6129 | 3-1129 | 3-7129 |
1200 | 300 | 10 22' | 0.82 | 3-4139 | 3-8139 | 3-2139 | 3-3139 | 3-5139 | 3-6139 | 3-1139 | 3-7139 |
1200 | 400 | 13 53' | 0.81 | 3-4149 | 3-8149 | 3-2149 | 3-3149 | 3-5149 | 3-6149 | 3-1149 | 3-7149 |
1200 | 500 | 17 27' | 0.8 | 3-4159 | 3-8159 | 3-2159 | 3-3159 | 3-5159 | 3-6159 | 3-1159 | 3-7159 |
1200 | 750 | 26 44' | 0.74 | 3-4179 | 3-8179 | 3-2179 | 3-3179 | 3-5179 | 3-6179 | 3-1179 | 3-7179 |
1200 | 1000 | 36 52' | 0.67 | 3-4119 | 3-8119 | 3-2119 | 3-3119 | 3-5119 | 3-6119 | 3-1119 | 3-7119 |
1800 | 240 | 12 29' | 0.54 | 3-4169 | 3-8169 | 3-2169 | 3-3169 | 3-5169 | 3-6169 | 3-1169 | 3-7169 |
1800 | 500 | 26 44' | 0.5 | 3-4189 | 3-8189 | 3-2189 | 3-3189 | 3-5189 | 3-6189 | 3-1189 | 3-7189 |
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