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Being the successor of the Model 3440 that thas been favorably received by many customers, the Model 5100 Series Mass Flow Controller is a multi-range type model provided with improved basic performance features. While, in appearance, it is a conventional mass flow controller, it provides many sophisticated features; particularly, its advanced sendor drive system minimizes zdro drift, one of the characteristic features of the predecessor model so acclaimed by customers, so that improved response can be obtained in low ranges.
Features
Improved control and response performance in every flow range
Improved performance to follow up set voltage (compatible with voltage ramping specification)
Range shift function to meet the multi-range requirement
Optimized valve to maximize the control resolutin in each range.
本公司可提供各种质量流量控制器（MFC），如Unit, Aera,Tylan,Brooks,Mks,Horiba的校准，维修，再生，二手品回收，新品销售，涉足半导体、光伏、LED等行业CVD、P工艺气体控制系统改造、设计、维修等业务，自动化应用集成，机器人应用、视觉系统、工业控制软件研发及制造，欢迎来电咨询：Wendy张，，邮箱，，公司网址：。
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