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X射线光栅
姓名：王工（Karl）
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X-ray di?raction grating
Rectangular grooves with period from 0.5 μm
Groove height up to 200 nm
Grating size up to 20×20 mm2
Substrate: Si, SiO2
Coatings:
thin ?lms W, Al, Au etc.
multilayer mirrors W/Si, Mo/Be, Cr/Sc etc.
substrate etching
Multilayer di?raction grating
period D=2 μm 50 W/Si bilayers (d=50 ?)
2D grating with round re?ecting multilayer elements
X-ray focusing
Grazing incidence phase Fresnel zone plates 1D or 2D x-ray focusing
Groove height up to 100 nm
Zone plate size:
1D focusing up to 50×50 mm2
2D focusing up to 20×0.2 mm2
Substrate: Si, SiO2
Coatings:
thin ?lms W, Al, Au etc
substrate etching
Central and outermost zones of grazing incidence zone plate
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