仪器对比
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技术参数：
Specifications Sensor Head ML4010波前传感器
| CCD-Sensor | 2/3” |
| Dynamic | 12bit |
| Pixel # | 1392 x 1040 |
|
Wavelength range |
350 nm - 1100 nm |
| Pupil size | 8.97 x 6.71 mm |
| Max. frame rate | 15 fps |
| Spatial Resolution | 200 μm |
| Number of Sub Apertures | 45 x 34 |
| Dynamic Range (Tilt) | ± 1,6° (730 lamda) |
| Wavefront Accuracy | < 16 μrad |
| Dynamic Range (Focus) | 72 mm (370 lamda) |
| Accuracy | 5 x 10-4 /m |
| System Accuracy | 10 nm |
| Repeatability | 100 nm |
| Wavefront Accuracy | 50 nm |
主要特点：
raylux software ML1205
• 快速在线波前计算
• Computation of Zernike polynomial terms (tilt, defocus, astigmatism,...)
• Automatic gain and shutter control
• Automatic synchronization with pulsed lasers
• Noise and background control
• Decrease measurement errors by averaging
• Numerical data files of wavefront
• 2D/3D display of wavefront viewable
from any angle or elevation with zoom
• Progression view (time dependent view
of all important parameters)
• M2 and beam divergence analysis
• Additional beam analysis in compliance to ISO
• Far field analysis
• Near field analysis
• Store and recall screens
in single or video fashion
• Fully flexible screen format including save
configuration
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