The sample data is summarised in the figure. The thickness of the DNA sensor pad was found to be of the order of 20 ?. This is consistent with the preparation of a layer of single molecular thickness as expected.The pads characterised had a variety of shapes. The example chosen here had a ring shape. The area covered by the analysis is 50 mm x 20 mm.
The high accuracy characterisation of the thicknesses and optical properties of III-V semiconductors has been successfully performed using the UVISEL Spectroscopic Phase Modulated Ellipsometer. Moreover, Spectroscopic Ellipsometry can be applied to characterise multilayers of miscellaneous binary, ternary semiconductors and alloys (MQW structure, PIN structure, pump laser, laser semiconductor,…).