中科院903万采购等离子设备 助力波导器件研发
p style="text-indent:32px line-height:150%"span style="font-size:16px line-height:150% font-family:宋体"7/spanspan style="font-size:16px line-height:150% font-family:宋体"月span30/span日,中国科学院半导体研究所曝出仪器设备采购需求,将以span903/span万的价格采购两台等离子设备。两台设备分别为厚氮化硅感应耦合等离子体化学气相沉积台和硅基铌酸锂薄膜电感耦合等离子刻蚀机。前者用于/spanspan style="font-size:16px line-height:150% font-family: 宋体"光波导器件表面的氧化硅及氮化硅薄膜淀积,适用于波导器件中包层薄膜的沉积。后者用于坚硬材料刻蚀形成波导,专为刻蚀铌酸锂材料研发,也可刻蚀氧化硅等材料。/span/pp style="text-indent:32px line-height:150%"strongspan style="font-size:16px line-height:150% font-family:宋体"项目名称:/span/strongspan style="font-size:16px line-height:150% font-family:宋体"2019/spanspan style="font-size:16px line-height:150% font-family:宋体"年中国科学院半导体研究所科研仪器设备采购项目(第三批)/span/pp style="text-indent:32px line-height:150%"strongspan style="font-size:16px line-height:150% font-family:宋体"项目编号:/span/strongspan style="font-size:16px line-height:150% font-family:宋体"OITC-G190330983 /span/pp style="text-indent:32px line-height:150%"strongspan style="font-size:16px line-height:150% font-family:宋体"采购单位联系方式:/span/strong/pp style="text-indent:32px line-height:150%"strongspan style="font-size:16px line-height:150% font-family:宋体"采购单位:/span/strongspan style="font-size: 16px line-height:150% font-family:宋体"中国科学院半导体研究所/span/pp style="text-indent:32px line-height:150%"strongspan style="font-size:16px line-height:150% font-family:宋体"地址:/span/strongspan style="font-size:16px line-height:150% font-family:宋体"北京市海淀区清华东路甲span35/span号/span/pp style="text-indent:32px line-height:150%"strongspan style="font-size:16px line-height:150% font-family:宋体"联系方式:/span/strongspan style="font-size:16px line-height:150% font-family:宋体"010-82304941/010-82304907/span/pp style="text-indent:32px line-height:150%"strongspan style="font-size:16px line-height:150% font-family:宋体"代理机构联系方式:/span/strong/pp style="text-indent:32px line-height:150%"strongspan style="font-size:16px line-height:150% font-family:宋体"代理机构:/span/strongspan style="font-size: 16px line-height:150% font-family:宋体"东方国际招标有限责任公司/span/pp style="text-indent:32px line-height:150%"strongspan style="font-size:16px line-height:150% font-family:宋体"代理机构联系人:/span/strongspan style="font-size:16px line-height:150% font-family:宋体"010-68290507/span/pp style="text-indent:32px line-height:150%"strongspan style="font-size:16px line-height:150% font-family:宋体"代理机构地址:/span/strongspan style="font-size: 16px line-height:150% font-family:宋体"北京市海淀区清华东路甲span35/span号/span/pp style="text-indent:32px"span style="font-size:16px font-family:宋体"采购详情如下:/span/ptable border="1" cellspacing="0" cellpadding="0" style="border: none"tbodytr class="firstRow"td width="114" valign="top" style="border: 1px solid rgb(0, 0, 0) padding: 5px "pstrongspan style="font-size:16px font-family:宋体"包号/span/strong/p/tdtd width="114" valign="top" style="border: 1px solid rgb(0, 0, 0) padding: 5px "pstrongspan style="font-size:16px font-family:宋体"货物名称/span/strong/p/tdtd width="114" valign="top" style="border: 1px solid rgb(0, 0, 0) padding: 5px "pstrongspan style="font-size:16px font-family:宋体"数量(台span//span套)/span/strong/p/tdtd width="114" valign="top" style="border: 1px solid rgb(0, 0, 0) padding: 5px "pstrongspan style="font-size:16px font-family:宋体"是否允许进口/span/strong/p/tdtd width="114" valign="top" style="border: 1px solid rgb(0, 0, 0) padding: 5px "pstrongspan style="font-size:16px font-family:宋体"预算(万元)/span/strong/p/td/trtrtd width="114" valign="top" style="border: 1px solid rgb(0, 0, 0) padding: 5px "pstrongspan style="font-size:16px font-family:宋体"1/span/strong/p/tdtd width="114" valign="top" style="border: 1px solid rgb(0, 0, 0) padding: 5px "pspan style="font-size:16px font-family:宋体"厚氮化硅感应耦合等离子体化学气相沉积台/span/p/tdtd width="114" valign="top" style="border: 1px solid rgb(0, 0, 0) padding: 5px "pspan style="font-size:16px font-family:宋体"1/span/p/tdtd width="114" valign="top" style="border: 1px solid rgb(0, 0, 0) padding: 5px "pspan style="font-size:16px font-family:宋体"是/span/p/tdtd width="114" valign="top" style="border: 1px solid rgb(0, 0, 0) padding: 5px "pspan style="font-size:16px font-family:宋体"398/span/p/td/trtrtd width="114" valign="top" style="border: 1px solid rgb(0, 0, 0) padding: 5px "pstrongspan style="font-size:16px font-family:宋体"2/span/strong/p/tdtd width="114" valign="top" style="border: 1px solid rgb(0, 0, 0) padding: 5px "pspan style="font-size:16px font-family:宋体"硅基铌酸锂薄膜电感耦合等离子刻蚀机/span/p/tdtd width="114" valign="top" style="border: 1px solid rgb(0, 0, 0) padding: 5px "pspan style="font-size:16px font-family:宋体"1/span/p/tdtd width="114" valign="top" style="border: 1px solid rgb(0, 0, 0) padding: 5px "pspan style="font-size:16px font-family:宋体"是/span/p/tdtd width="114" valign="top" style="border: 1px solid rgb(0, 0, 0) padding: 5px "pspan style="font-size:16px font-family:宋体"505/span/p/td/tr/tbody/tablep style="text-indent:32px"strongspan style="font-size:16px font-family: 宋体"各设备工艺技术规格详情:/span/strong/pp style="text-align:center"strongspan style="font-size:16px font-family:宋体"厚氮化硅感应耦合等离子体化学气相沉积台/span/strong/pp style="line-height:150%"span style="font-size: 16px line-height:150% font-family:宋体"(1)/spanspan style="font-size:16px line-height:150% font-family:宋体"氧化硅薄膜沉积/span/ptable border="0" cellspacing="0" cellpadding="0"tbodytr style=" height:26px" class="firstRow"td width="301" valign="top" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"p style="text-indent:16px line-height:150%"span style="font-size:16px line-height:150% font-family:宋体"*3.15.1.1/spanspan style="font-size:16px line-height:150% font-family:宋体"折射率(span1550nm/span下测量)/span/p/tdtd width="179" valign="top" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"p style="text-indent:16px line-height:150%"span style="font-size:16px line-height:150% font-family:宋体"1.44-1.52/spanspan style="font-size:16px line-height:150% font-family:宋体"可调/span/p/td/trtr style=" height:26px"td width="301" valign="top" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"p style="text-indent:16px line-height:150%"span style="font-size:16px line-height:150% font-family:宋体"#3.15.1.2/spanspan style="font-size:16px line-height:150% font-family:宋体"折射率均匀性/span/p/tdtd width="179" valign="top" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"p style="text-indent:16px line-height:150%"span style="font-size:16px line-height:150% font-family:宋体" +/-0.01/span/p/td/trtr style=" height:26px"td width="301" valign="top" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"p style="text-indent:16px line-height:150%"span style="font-size:16px line-height:150% font-family:宋体"#3.15.1.3/spanspan style="font-size:16px line-height:150% font-family:宋体"折射率重复性/span/p/tdtd width="179" valign="top" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"p style="text-indent:16px line-height:150%"span style="font-size:16px line-height:150% font-family:宋体" +/-0.01/span/p/td/trtr style=" height:26px"td width="301" valign="top" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"p style="text-indent:16px line-height:150%"span style="font-size:16px line-height:150% font-family:宋体"*3.15.1.4/spanspan style="font-size:16px line-height:150% font-family:宋体"厚度/span/p/tdtd width="179" valign="top" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"p style="text-indent:16px line-height:150%"span style="font-size:16px line-height:150% font-family:宋体">span20/spanμspanm/span/span/p/td/trtr style=" height:26px"td width="301" valign="top" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"p style="text-indent:16px line-height:150%"span style="font-size:16px line-height:150% font-family:宋体"3.15.1.5/spanspan style="font-size:16px line-height:150% font-family:宋体"样品尺寸/span/p/tdtd width="179" valign="top" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"p style="text-indent:16px line-height:150%"span style="font-size:16px line-height:150% font-family:宋体"3/spanspan style="font-size:16px line-height:150% font-family:宋体"英寸/span/p/td/trtr style=" height:26px"td width="301" valign="top" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"p style="text-indent:16px line-height:150%"span style="font-size:16px line-height:150% font-family:宋体"3.15.1.6/spanspan style="font-size:16px line-height:150% font-family:宋体"沉积速度/span/p/tdtd width="179" valign="top" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"p style="text-indent:16px line-height:150%"span style="font-size:16px line-height:150% font-family:宋体" 1500A/min/span/p/td/trtr style=" height:26px"td width="301" valign="top" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"p style="text-indent:16px line-height:150%"span style="font-size:16px line-height:150% font-family:宋体"#3.15.1.7/spanspan style="font-size:16px line-height:150% font-family:宋体"片内厚度均匀性/span/p/tdtd width="179" valign="top" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"p style="text-indent:16px line-height:150%"span style="font-size:16px line-height:150% font-family:宋体" +/-3%/span/p/td/trtr style=" height:26px"td width="301" valign="top" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"p style="text-indent:16px line-height:150%"span style="font-size:16px line-height:150% font-family:宋体"3.15.1.7/spanspan style="font-size:16px line-height:150% font-family:宋体"片与片厚度均匀性/span/p/tdtd width="179" valign="top" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"p style="text-indent:16px line-height:150%"span style="font-size:16px line-height:150% font-family:宋体" +/-5%/span/p/td/trtr style=" height:26px"td width="301" valign="top" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"p style="text-indent:16px line-height:150%"span style="font-size:16px line-height:150% font-family:宋体"3.15.1.9/spanspan style="font-size:16px line-height:150% font-family:宋体"硅的应力span (/span以span1/span微米薄膜厚度测试span)/span/span/p/tdtd width="179" valign="top" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"p style="text-indent:16px line-height:150%"span style="font-size:16px line-height:150% font-family:宋体" -300MPa /spanspan style="font-size:16px line-height:150% font-family:宋体"压应力/span/p/td/tr/tbody/tablep style="line-height:150%"span style="font-size: 16px line-height:150% font-family:宋体"(2)/spanspan style="font-size:16px line-height:150% font-family:宋体"氮化硅薄膜沉积/span/ptable border="0" cellspacing="0" cellpadding="0"tbodytr style=" height:26px" class="firstRow"td width="301" valign="top" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"p style="text-indent:16px line-height:150%"span style="font-size:16px line-height:150% font-family:宋体"#3.15.2.1/spanspan style="font-size:16px line-height:150% font-family:宋体"折射率(span1550nm/span下测量)/span/p/tdtd width="179" valign="top" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"p style="text-indent:16px line-height:150%"span style="font-size:16px line-height:150% font-family:宋体"1.8-2.2/spanspan style="font-size:16px line-height:150% font-family:宋体"可调/span/p/td/trtr style=" height:26px"td width="301" valign="top" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"p style="text-indent:16px line-height:150%"span style="font-size:16px line-height:150% font-family:宋体"#3.15.2.2/spanspan style="font-size:16px line-height:150% font-family:宋体"折射率均匀性/span/p/tdtd width="179" valign="top" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"p style="text-indent:16px line-height:150%"span style="font-size:16px line-height:150% font-family:宋体" +/-0.01/span/p/td/trtr style=" height:26px"td width="301" valign="top" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"p style="text-indent:16px line-height:150%"span style="font-size:16px line-height:150% font-family:宋体"3.15.2.3/spanspan style="font-size:16px line-height:150% font-family:宋体"折射率重复性/span/p/tdtd width="179" valign="top" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"p style="text-indent:16px line-height:150%"span style="font-size:16px line-height:150% font-family:宋体" +/-0.01/span/p/td/trtr style=" height:26px"td width="301" valign="top" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"p style="text-indent:16px line-height:150%"span style="font-size:16px line-height:150% font-family:宋体"3.15.2.4/spanspan style="font-size:16px line-height:150% font-family:宋体"沉积速度/span/p/tdtd width="179" valign="top" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"p style="text-indent:16px line-height:150%"span style="font-size:16px line-height:150% font-family:宋体" 200A/min/span/p/td/trtr style=" height:26px"td width="301" valign="top" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"p style="text-indent:16px line-height:150%"span style="font-size:16px line-height:150% font-family:宋体"3.15.2.5/spanspan style="font-size:16px line-height:150% font-family:宋体"样品尺寸/span/p/tdtd width="179" valign="top" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"p style="text-indent:16px line-height:150%"span style="font-size:16px line-height:150% font-family:宋体"3/spanspan style="font-size:16px line-height:150% font-family:宋体"英寸/span/p/td/trtr style=" height:26px"td width="301" valign="top" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"p style="text-indent:16px line-height:150%"span style="font-size:16px line-height:150% font-family:宋体"#3.15.2.6/spanspan style="font-size:16px line-height:150% font-family:宋体"片内厚度均匀性/span/p/tdtd width="179" valign="top" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"p style="text-indent:16px line-height:150%"span style="font-size:16px line-height:150% font-family:宋体" +/-3%/span/p/td/trtr style=" height:26px"td width="301" valign="top" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"p style="text-indent:16px line-height:150%"span style="font-size:16px line-height:150% font-family:宋体"3.15.2.7/spanspan style="font-size:16px line-height:150% font-family:宋体"片与片厚度均匀性/span/p/tdtd width="179" valign="top" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"p style="text-indent:16px line-height:150%"span style="font-size:16px line-height:150% font-family:宋体" +/-5%/span/p/td/trtr style=" height:26px"td width="301" valign="top" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"p style="text-indent:16px line-height:150%"span style="font-size:16px line-height:150% font-family:宋体"3.15.2.8/spanspan style="font-size:16px line-height:150% font-family:宋体"硅的应力span (/span以span1/span微米薄膜厚度测试span)/span/span/p/tdtd width="179" valign="top" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"p style="text-indent:16px line-height:150%"span style="font-size:16px line-height:150% font-family:宋体" 100MPa /spanspan style="font-size:16px line-height:150% font-family:宋体"伸应力/span/p/td/tr/tbody/tablep style="text-align:center"strongspan style="font-size:16px font-family:宋体" /span/strong/pp style="text-align:center"strongspan style="font-size:16px font-family:宋体"硅基铌酸锂薄膜电感耦合等离子刻蚀机/span/strong/pp style="text-indent:16px line-height:150%"span style="font-size:16px line-height:150% font-family: 宋体"(span1/span) 铌酸锂刻蚀工艺/span/ptable border="0" cellspacing="0" cellpadding="0"tbodytr style=" height:26px" class="firstRow"td width="301" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"pspan style="font-size: 16px font-family: 宋体"3.15.1.1/spanspan style="font-size: 16px font-family: 宋体"刻蚀/spanspan style="font-size:16px font-family:宋体"材料/span/p/tdtd width="173" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"pspan style="font-size:16px font-family:宋体"铌酸锂/span/p/td/trtr style=" height:26px"td width="301" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"pspan style="font-size:16px font-family:宋体"3.1/spanspan style="font-size:16px font-family:宋体"5/spanspan style="font-size:16px font-family:宋体".1/spanspan style="font-size:16px font-family:宋体".2/spanspan style="font-size:16px font-family:宋体"刻蚀结构/span/p/tdtd width="173" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"pspan style="font-size:16px font-family:宋体"线宽span100nm-1/spanμspanm/span/spanspan style="font-size:16px font-family:宋体"波导/span/p/td/trtr style=" height:26px"td width="301" valign="top" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"pspan style="font-size: 16px font-family: 宋体"3.15.1.3/spanspan style="font-size: 16px font-family: 宋体"掩膜/span/p/tdtd width="173" valign="top" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"pspan style="font-size:16px font-family:宋体" 200nm/spanspan style="font-size: 16px font-family: 宋体"厚/spanspan style="font-size:16px font-family:宋体"Cr/spanspan style="font-size: 16px font-family: 宋体"硬掩模。/span/ppspan style="font-size: 16px font-family: 宋体"所有刻蚀掩膜必须为挺直,侧壁角度/spanspan style="font-size:16px font-family:宋体" 80/spanspan style="font-size:16px font-family:宋体"° /span/p/td/trtr style=" height:26px"td width="301" valign="top" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"pspan style="font-size: 16px font-family: 宋体"3.15.1.4/spanspan style="font-size: 16px font-family: 宋体"曝露面积/span/p/tdtd width="173" valign="top" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"pspan style="font-size:16px font-family:宋体">/spanspan style="font-size:16px font-family:宋体"80%/span/p/td/trtr style=" height:26px"td width="301" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"pspan style="font-size:16px font-family:宋体"3.1/spanspan style="font-size:16px font-family:宋体"5/spanspan style="font-size:16px font-family:宋体".1/spanspan style="font-size:16px font-family:宋体".5/spanspan style="font-size:16px font-family:宋体"刻蚀深度/span/p/tdtd width="173" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"pspan style="font-size:16px font-family:宋体"300-700/spanspan style="font-size:16px font-family:宋体"nm/span/p/td/trtr style=" height:26px"td width="301" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"pspan style="font-size:16px font-family:宋体"3.1/spanspan style="font-size:16px font-family:宋体"5/spanspan style="font-size:16px font-family:宋体".1/spanspan style="font-size:16px font-family:宋体".6/spanspan style="font-size:16px font-family:宋体"刻蚀速度/span/p/tdtd width="173" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"pspan style="font-size:16px font-family:宋体" 30nm/min/span/p/td/trtr style=" height:26px"td width="301" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"pspan style="font-size:16px font-family:宋体"*/spanspan style="font-size:16px font-family:宋体"3.1/spanspan style="font-size:16px font-family:宋体"5/spanspan style="font-size:16px font-family:宋体".1/spanspan style="font-size:16px font-family:宋体".7/spanspan style="font-size:16px font-family:宋体"片内刻蚀深度均匀性/span/p/tdtd width="173" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"pspan style="font-size:16px font-family:宋体" /spanspan style="font-size:16px font-family:宋体"± /spanspan style="font-size:16px font-family:宋体"3%/span/p/td/trtr style=" height:26px"td width="301" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"pspan style="font-size:16px font-family:宋体"#/spanspan style="font-size:16px font-family:宋体"3.1/spanspan style="font-size:16px font-family:宋体"5/spanspan style="font-size:16px font-family:宋体".1/spanspan style="font-size:16px font-family:宋体".8/spanspan style="font-size:16px font-family:宋体"片与片刻蚀深度均匀性/span/p/tdtd width="173" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"pspan style="font-size:16px font-family:宋体" /spanspan style="font-size:16px font-family:宋体"± /spanspan style="font-size:16px font-family:宋体"5%/span/p/td/trtr style=" height:26px"td width="301" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"pspan style="font-size:16px font-family:宋体"*/spanspan style="font-size:16px font-family:宋体"3.1/spanspan style="font-size:16px font-family:宋体"5/spanspan style="font-size:16px font-family:宋体".1/spanspan style="font-size:16px font-family:宋体".9/spanspan style="font-size:16px font-family:宋体"对应/spanspan style="font-size:16px font-family:宋体"硬掩模/spanspan style="font-size:16px font-family:宋体"选择比/span/p/tdtd width="173" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"pspan style="font-size:16px font-family:宋体" 5:1/span/p/td/trtr style=" height:26px"td width="301" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"pspan style="font-size:16px font-family:宋体"*3.15.1.10/spanspan style="font-size:16px font-family:宋体"侧壁倾角/span/p/tdtd width="173" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"pspan style="font-size:16px font-family:宋体" 75/spanspan style="font-size:16px font-family:宋体"° /span/p/td/trtr style=" height:26px"td width="301" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"pspan style="font-size:16px font-family:宋体"*3.15.1.11/spanspan style="font-size:16px font-family:宋体"侧壁粗糙度/span/p/tdtd width="173" style="border: 1px solid rgb(0, 0, 0) padding: 5px word-break: break-all " height="26"pspan style="font-size:16px font-family:宋体"</spanspan style="font-size:16px font-family:宋体"10nm/spanstrongspan style="font-family: 宋体 " /span/strong/p/td/tr/tbody/tablep style="text-indent:16px line-height:150%"span style="font-size:16px line-height:150% font-family: 宋体"br/(span2/span) 氧化硅刻蚀工艺/span/ptable border="0" cellspacing="0" cellpadding="0"tbodytr style=" height:26px" class="firstRow"td width="301" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"pspan style="font-size: 16px font-family: 宋体"3.15.2.1/spanspan style="font-size: 16px font-family: 宋体"刻蚀/spanspan style="font-size:16px font-family:宋体"材料/span/p/tdtd width="173" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"pspan style="font-size:16px font-family:宋体"氧化硅/span/p/td/trtr style=" height:26px"td width="301" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"pspan style="font-size:16px font-family:宋体"3.1/spanspan style="font-size:16px font-family:宋体"5/spanspan style="font-size:16px font-family:宋体".2/spanspan style="font-size:16px font-family:宋体".2/spanspan style="font-size:16px font-family:宋体"刻蚀结构/span/p/tdtd width="173" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"pspan style="font-size:16px font-family:宋体"线宽span5-/span/spanspan style="font-size:16px font-family:宋体"10/spanspan style="font-size:16px font-family:宋体"μ/spanspan style="font-size:16px font-family:宋体"m/spanspan style="font-size:16px font-family:宋体"波导/span/p/td/trtr style=" height:26px"td width="301" valign="top" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"pspan style="font-size: 16px font-family: 宋体"3.15.2.3/spanspan style="font-size: 16px font-family: 宋体"掩膜/span/p/tdtd width="173" valign="top" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"pspan style="font-size:16px font-family:宋体" 3um/spanspan style="font-size: 16px font-family: 宋体"厚/spanspan style="font-size:16px font-family:宋体"PR/spanspan style="font-size: 16px font-family: 宋体"。/span/ppspan style="font-size: 16px font-family: 宋体"所有刻蚀掩膜必须为挺直,侧壁角度/spanspan style="font-size:16px font-family:宋体" 80/spanspan style="font-size:16px font-family:宋体"° /span/p/td/trtr style=" height:26px"td width="301" valign="top" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"pspan style="font-size: 16px font-family: 宋体"3.15.2.4/spanspan style="font-size: 16px font-family: 宋体"曝露面积/span/p/tdtd width="173" valign="top" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"pspan style="font-size:16px font-family:宋体" 15%/span/p/td/trtr style=" height:26px"td width="301" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"pspan style="font-size:16px font-family:宋体"3.1/spanspan style="font-size:16px font-family:宋体"5/spanspan style="font-size:16px font-family:宋体".2/spanspan style="font-size:16px font-family:宋体".5/spanspan style="font-size:16px font-family:宋体"刻蚀深度/span/p/tdtd width="173" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"pspan style="font-size:16px font-family:宋体"6-15/spanspan style="font-size:16px font-family:宋体"um/span/p/td/trtr style=" height:26px"td width="301" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"pspan style="font-size:16px font-family:宋体"3.1/spanspan style="font-size:16px font-family:宋体"5/spanspan style="font-size:16px font-family:宋体".2/spanspan style="font-size:16px font-family:宋体".6/spanspan style="font-size:16px font-family:宋体"刻蚀速度/span/p/tdtd width="173" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"pspan style="font-size:16px font-family:宋体" 3000A/min/span/p/td/trtr style=" height:26px"td width="301" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"pspan style="font-size:16px font-family:宋体"#/spanspan style="font-size:16px font-family:宋体"3.1/spanspan style="font-size:16px font-family:宋体"5/spanspan style="font-size:16px font-family:宋体".2/spanspan style="font-size:16px font-family:宋体".7/spanspan style="font-size:16px font-family:宋体"片内刻蚀深度均匀性/span/p/tdtd width="173" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"pspan style="font-size:16px font-family:宋体" /spanspan style="font-size:16px font-family:宋体"± /spanspan style="font-size:16px font-family:宋体"3%/span/p/td/trtr style=" height:26px"td width="301" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"pspan style="font-size:16px font-family:宋体"#/spanspan style="font-size:16px font-family:宋体"3.1/spanspan style="font-size:16px font-family:宋体"5/spanspan style="font-size:16px font-family:宋体".2/spanspan style="font-size:16px font-family:宋体".8/spanspan style="font-size:16px font-family:宋体"片与片刻蚀深度均匀性/span/p/tdtd width="173" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"pspan style="font-size:16px font-family:宋体" /spanspan style="font-size:16px font-family:宋体"± /spanspan style="font-size:16px font-family:宋体"5%/span/p/td/trtr style=" height:26px"td width="301" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"pspan style="font-size:16px font-family:宋体"3.1/spanspan style="font-size:16px font-family:宋体"5/spanspan style="font-size:16px font-family:宋体".2./spanspan style="font-size:16px font-family:宋体"9/spanspan style="font-size:16px font-family:宋体"对应光刻胶选择比/span/p/tdtd width="173" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"pspan style="font-size:16px font-family:宋体" 3:1/span/p/td/trtr style=" height:26px"td width="301" style="border: 1px solid rgb(0, 0, 0) padding: 5px " height="26"pspan style="font-size:16px font-family:宋体"3.1/spanspan style="font-size:16px font-family:宋体"5/spanspan style="font-size:16px font-family:宋体".2./spanspan style="font-size:16px font-family:宋体"10/spanspan style="font-size:16px font-family:宋体"角度/span/p/tdtd width="173" style="border: 1px solid rgb(0, 0, 0) padding: 5px word-break: break-all " height="26"pspan style="font-size:16px font-family:宋体" 85/spanspan style="font-size:16px font-family:宋体"° /span/p/td/tr/tbody/table