This particular investigation of phosphor emission characteristics was made possible by the excellent stray-light reflection, sensitivity, and wide lifetime range of the FLUOROLOG-τ® producing rapid and accurate characterization of the phosphor.
Spectroscopic ellipsometry is an excellent technique for the highly accurate characterization of TFT-LCD display panels based on a-Si and LTPS technologies. Owing to the sensitivity of the UVISEL spectroscopic ellipsometer and the advanced modeling features included in the DeltaPsi2 software it is possible to detect in a multistack different a-Si layers processed by various methods. Moreover the spectroscopic ellipsometry measurements allow determination of the grain size of p-Si films and illustrate the ability to characterize the crystallinity ofsilicon with high accuracy.