椭圆偏振光谱仪的标准应用
Ellipsometry is a very versatile optical technique that has applications in many different fields, from the microelectronics and semiconductor industries (for characterizing oxides or photoresists on silicon wafers, for example) to biology. This very sensitive measurement technique provides unequalled capabilities for thin filmmetrology, and has the advantage that it is non-destructive as it uses polarized light to probe the dielectrproperties of a sample.