KLA发布全新SiC、GaN衬底缺陷检测系统Candela® 8520
p style=" text-indent: 2em " span 2020 /span 年 span 8 /span 月 span 27 /span 日, span style=" text-align: justify text-indent: 28px " KLA /span span style=" text-align: justify text-indent: 28px " 仪器发布针对功率器件的 /span span style=" text-align: justify text-indent: 28px font-family: Arial, sans-serif color: rgb(12, 12, 18) background: white " Candela sup & reg /sup & nbsp 8520& nbsp /span span style=" text-align: justify text-indent: 28px color: rgb(12, 12, 18) background: white " 缺陷检测系统。该设备继承自首款将表面形貌和晶体缺陷的检测和分类集成至一个平台的 /span span style=" text-align: justify text-indent: 28px font-family: Arial, sans-serif color: rgb(12, 12, 18) background: white " Candela sup & reg /sup & nbsp CS920 /span span style=" text-align: justify text-indent: 28px color: rgb(12, 12, 18) background: white " 系统。 /span span style=" text-align: justify text-indent: 28px font-family: Arial, sans-serif color: rgb(12, 12, 18) background: white " Candela 8520 /span span style=" text-align: justify text-indent: 28px color: rgb(12, 12, 18) background: white " 的检测速度是前身的两倍多,对于快速增长的功率器件市场来说,能够更好地提升产量。 /span /p p style=" text-indent: 0em " span style=" text-align: justify text-indent: 28px color: rgb(12, 12, 18) background: white " img style=" max-width:100% max-height:100% " src=" https://img1.17img.cn/17img/images/202009/uepic/a90c3a0c-9641-41fe-82c5-40f2269b2f5a.jpg" title=" AdvanceBlogCandela-01_300dpi__002_.jpg" alt=" AdvanceBlogCandela-01_300dpi__002_.jpg" / /span /p p style=" text-align: right text-indent: 0em " span style=" font-family:& #39 Arial& #39 ,sans-serif color:#0C0C12 background:white" span style=" text-align: justify text-indent: 28px font-family: Arial, sans-serif color: rgb(12, 12, 18) background: white " Candela sup & reg /sup & nbsp 8520& nbsp /span span style=" text-align: justify text-indent: 28px color: rgb(12, 12, 18) background: white " 缺陷检测系统(KLA官网) /span br/ /span /p p style=" text-indent: 28px text-align: justify " span style=" font-family:& #39 Arial& #39 ,sans-serif color:#0C0C12 background:white" Candela 8520 /span span style=" color:#0C0C12 background:white" 晶圆检测系统能够弥补关键缺陷检测漏洞,例如裸晶圆上的堆积层错和外延生长后的基面位错。该系统还配备有一些分析工具,如在线缺陷检测,芯片分选和轮廓线图。该系统能够生成一个综合检测报告来帮助工艺工程师更精准的改进工艺。 /span /p p style=" text-indent: 28px text-align: justify " span style=" font-family:& #39 Arial& #39 ,sans-serif color:#0C0C12 background:white" Candela 8520 /span span style=" color:#0C0C12 background:white" 集成了五种互补的检测技术,通过这些技术的结合可以精确地区分多种缺陷,如微管和微坑、胡萝卜型和基面位错,堆积层错和台阶聚集等。同时还能捕捉到影响 /span span style=" font-family:& #39 Arial& #39 ,sans-serif color:#0C0C12 background:white" SiC /span span style=" color:#0C0C12 background:white" 衬底和外延工艺控制的大型形貌缺陷。 /span /p p style=" text-align: center text-indent: 0em " img style=" max-width:100% max-height:100% " src=" https://www.kla-tencor.com/wp-content/uploads/Candela_8520_Launch_Blog_Infographic_FINAL_PNG.png" / /p p style=" text-indent: 0em text-align: right " (图来自KLA Instrument官网)& nbsp /p p style=" text-indent: 28px text-align: justify " 将暗场、明场、坡度、相位和光致发光技术集于单一平台,对功率器件制造商提高产量具有重大价值。 /p p style=" text-indent: 28px text-align: justify " span Candela 8520 /span 检测系统由 span KLA /span 的全球服务网络支持团队提供维护来确保产品的高效运转和生产。 /p