Sub-10nm-EDS-analysis-in-the-SEM
Testing EDS spatial resolution using a tin sphere on carbonimaging standardUsing 2 kV at 5 mm WD, a spectrum image (6,500 cps, 15 minutes) was collected from an area of the standard where thesmallest spheres were concentrated. The X-ray data were reconstructed into a ‘layered map’ combining the Sn M (400 eV) andO K signals from the Sn spheres (Fig. 1). Inspection of the image shows that spheres down to 10 nm in diameter are clearlydifferentiated. Smaller spheres, which were measured at 7.5 nm, can also be distinguished in the image.