TMC 数字精密电子定位系统光学平台数字精密电子定位系统peps® II是在TMC的专利peps® (精密电子定位系统)基础上建立的并进行了改善。通过添加一个新的数字控制器使pep® II的使用更简单,提供了更多的功能,并且具有改进的用户界面。peps® II是用于TMC气浮隔振系统的数字式非接触高度控制系统。这种系统通常包含机械高度阀和机械高度传感装置,其应用范围从用于半导体制造设备提高沉降时间和增加产量,到要求噪声性能和稳定的平台的精密实验室环境。 特性和好处?数字控制,用户友好的LCD接口?用于Gimbal Piston,CSP和Maxdamp的非接触式电动气浮高度控制隔振系统?z轴位置重复性:10微米?通过消除常规机械高度控制系统的杠杆接触点改善隔振性能?气浮前馈功能使z轴对x - y轴运动的反应达到zui 小化?可选“VX”功能集成惯性传感器,用于垂直隔离器共振主动阻尼?比例电子阀。通过使用“开关”或传统电子阀门无脉冲噪声引入Specifications-Physical DimensionsPEPS® II Controller 1.72" (43.7mm) H x 8.0" (203mm) W x 9.4" (240 mm) DWeightsPEPS® II Controller: approximately 3.0 lb (1.2 kg)Environmental(refer to EN 61010-1: 1993,EN 61010-1/A2: 1995)For indoor use only, up to an elevation of 2,000 m (6560 ft.)Maximum allowable temperature range: 5° C to 35° CMaximum allowable humidity: 80% up to 31° C, decreasing linearly to 50% relative humidity at 40° CTolerance in main supply voltage: 85 VAC - 240 VACOver voltage category: 2Pollution degree (IEC 664): 2Ventilation requirements: 25 mm clearance on sides, 0 mm top and bottomPower RequirementsPower input voltage range: 90-230 VACInput frequency range: 50-60 HzPEPS® II User Interface (Front Panel)Power switch4 menu buttons LCD display 20 x 2 characters 2 diagnostic sockets (BNC-type) Three-color status LED USB portPEPS® II Interface(Rear Panel)AC power entry with EMI filter1 air INPUT snap-in port for 1/4" O.D. tubing 1 air OUTPUT (Exhaust) snap-in port for 1/4" O.D. tubing 4 air snap-in ports for 1/4" O.D. tubing (one per isolator) DB-25 male inputs-outputs and feedforward socket1 Phoenix 0.2" pitch 6 pins GREEN header (vertical proximity sensors) 1 Phoenix 3.5 mm pitch 6 pins BLACK header(horizontal proximity sensors) Grounding threaded stud (#10-32 thread) DB-25 F socket: 1x digital Input, 3x geophone sensorsinterface (“-VX” option) DB-25 F socket: 1x digital input, 3x current output proximity sensors (optional)PEPS® IIPerformance SpecificationsAnalog inputs (unipolar): 8 x 12 bit (16 bit using over sampling), 0…3.0 V full scaleAnalog inputs (feedforward): 5 x 12 bit (16 bit using over sampling), ±9 V full scaleAnalog inputs (unipolar) protection: +5 Volts, -0.5 V clippingAnalog input (feedforward) protection: ±15 Volts clippingAnalog outputs: 4 x 12 bit (16 bit with over sampling), 0…3.0 V full scaleAnalog outputs (OPTIONAL): 8 x 16 bit, 0…3.0 V full scaleAnalog output protection: indefinite short circuit protection, +5 Volts clippingDigital input voltage rating: 0…+3.3 V, +5 V tolerant (+5 Volts clipping)Digital output rating: 0…+3.3 V, 20 mA max.Digital I/O protection: +5 Volts, -0.5 Volts clippingExternal available power: +5 VDC, 2.0 A max +15 VDC, 1.0 A max. (20 Watt max)Communication port: USB, appears as RS-232 on PCProcessor: ARM7TDMI / 41.78 MHzControl loop rate: 100 Hz - 2.0 KHzProximity sensors: 3x vertical, (3x horizontal optional) Eddy current, NAMUR 0-20 mA outputVelocity sensors - geophones (“-VX” option): 3x vertical, current outputPneumatic SpecificationsLong-term height stability: ±50 micronsLong-term tilt stability: ±50 micro radiansServo valves: 4 x 2-way variable-orifice proportional servo valvesValving technique: pure class-A Maximum input pressure: 120 PSI or 8.3 Bar or 830 KPaNominal air consumption: 60 slpm (2 scfm)Air requirements: clean, dry air, filtered to 20 microns or betterFail safe: isolators deflate on power failure or power offPneumatic fittings: 'one touch' quick fittings for 1/4" O.D. hose
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