Simultaneous EDS and EELS Analysis in the TEM
IntroductionIn Transmission Electron Microscopy (TEM) there are two ‘go to’ techniques for elemental analysis: EnergyDispersive X-ray Spectroscopy, (EDS), and Electron Energy Loss Spectroscopy, (EELS).EDS is a mature technique that can be used for most specimens. The intensity of generated X-raysis proportional to the mass thickness of the sample. However, this can become a limitation for verythin specimens or those comprising light elements. On the other hand, EELS is more suitable for thinsamples where the thickness is less than the inelastic mean free path of electrons in the material. EELSdoes, however, give high signal to noise for light elements. Simultaneous acquisition of both signals is apowerful tool for materials analysis.