NA-EBSD-AZtecSynergy-太阳能电池
An important part of the research and development of thin-film solar cells is the characterisation of microstructural andcompositional properties of the functional layers. For this purpose, energy-dispersive X-ray spectrometry (EDS) and electronbackscatter diffraction (EBSD) represent techniques which exhibit spatial resolutions on the nanometer scale but can be, atthe same time, applied on large areas of several square millimeters. The application of EDS and EBSD is demonstrated on thisexample of thin-film solar cells with Cu(In,Ga)Se2 absorber layers. While EDS provides elemental distributions even in layerswith a nominal thickness of 30-50 nm, EBSD gives not only information of average grain sizes, local orientations and grainboundaries. Moreover, strain distributions within individual grains can be calculated by the evaluation of EBSD patterns recordedon individual grains.