其他null检测 | Simultaneous EDS and EELS Analysis in the TEM-牛津仪器科技（上海）有限公司

方案摘要

方案下载

应用领域	半导体
检测样本	其他
检测项目
参考标准	无

Introduction In Transmission Electron Microscopy (TEM) there are two ‘go to’ techniques for elemental analysis: Energy Dispersive X-ray Spectroscopy, (EDS), and Electron Energy Loss Spectroscopy, (EELS). EDS is a mature technique that can be used for most specimens. The intensity of generated X-rays is proportional to the mass thickness of the sample. However, this can become a limitation for very thin specimens or those comprising light elements. On the other hand, EELS is more suitable for thin samples where the thickness is less than the inelastic mean free path of electrons in the material. EELS does, however, give high signal to noise for light elements. Simultaneous acquisition of both signals is a powerful tool for materials analysis.

方案下载

配置单

电镜专用微区成分分析---牛津仪器Xplore能谱仪
型号：Xplore15/Xplore30

¥30万 - 40万
咨询

方案详情

Introduction

In Transmission Electron Microscopy (TEM) there are two ‘go to’ techniques for elemental analysis: Energy

Dispersive X-ray Spectroscopy, (EDS), and Electron Energy Loss Spectroscopy, (EELS).

EDS is a mature technique that can be used for most specimens. The intensity of generated X-rays

is proportional to the mass thickness of the sample. However, this can become a limitation for very

thin specimens or those comprising light elements. On the other hand, EELS is more suitable for thin

samples where the thickness is less than the inelastic mean free path of electrons in the material. EELS

does, however, give high signal to noise for light elements. Simultaneous acquisition of both signals is a

powerful tool for materials analysis.

上一篇一文了解 EDS 能谱技术发展历程

下一篇 Rapid Characterisation of Steel and Ni

文献贡献者

牛津仪器科技（上海）有限公司

白金会员丨第23年

查看全部资料