AN1017_Preparaing lamellae with Backside Thinning with the OmniProbe 400...

2020/06/15   下载量: 0

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应用领域 钢铁/金属
检测样本 其他
检测项目 理化分析>其他
参考标准

Introduction When preparing a TEM lamella in focused ion beam (FIB), curtaining is a common obstacle. Curtaining is a roughness on the lamella as a result of non-uniform thinning which critically affects the quality of analytical data collected, in addition to the ability to image and thin the lamella. A common cause of curtaining is the presence of different materials with a range of milling rates. The solution we discuss here to reduce curtaining is to change the orientation in which a lamella is ion beam polished/thinned by using the rotation function of the OmniProbe 400 nanomanipulator.

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Introduction

When preparing a TEM lamella in focused ion beam (FIB), curtaining is a common obstacle. Curtaining is a

roughness on the lamella as a result of non-uniform thinning which critically affects the quality of analytical data

collected, in addition to the ability to image and thin the lamella. A common cause of curtaining is the presence of

different materials with a range of milling rates. The solution we discuss here to reduce curtaining is to change the

orientation in which a lamella is ion beam polished/thinned by using the rotation function of the OmniProbe 400

nanomanipulator.


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