SEM-CL在光电材料的缺陷检测和计量方面的应用

2023/03/21   下载量: 0

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应用领域 半导体
检测样本 光电器件
检测项目
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The emergence of new materials have paved the way to nano-electronic and optoelectronic devices with improved or new capabilities. For instance, III-V based alloys have revolutionized the LED industry finding applications in high power electronics, and may speed up micro- electronic devices in the near future. Unfortunately, their wide scaled implementation is still limited by the presence of highly concentrated crystallographic or impurity defects. Such defects are typically of sub-nanometric size and are therefore difficult to observe directly. Defect metrology is by consequence of very high importance to assess fabrication processes. Three methods are traditionally implemented to determine the density of defects in optoelectronic devices

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阴极荧光分析系统SEM-CL在光电材料的缺陷检测和计量方面的应用

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