方案摘要
双束激光干涉仪对超薄膜的压电性能进行测试A new method for piezoelectric measurements in ferroelectric thin films using a double-beam laser interferometer is reported.
文献贡献者
原子力显微镜结合铁电分析仪研究Nd掺杂Bi4Ti3O12 薄膜的机电性质
Mechanical properties and quality of diamond films by MPECVD
Low-temperature plasma enhanced chemical vapour deposition(PECVD) of carbon nanotubes(CNT)
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