型号: | 康宁7980上镀Si3N4 |
产地: | 美国 |
品牌: | 合肥科晶 |
评分: |
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产品名称: | 康宁7980上镀Si3N4(Silicon Nitride Film (LPCVD) on Corning 7980)
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产品简介: | The Si3N4 film may have stressed induced micro-cracking resulted from the large difference of thermal expansion coefficient between Si3N4 and SiO2 fused silica
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技术参数: | Si3N4薄膜:镀膜方法:low stress LPCVD method低压力化学气相沉积法膜层厚度:1.3um +/- 5%镀膜情况:双面镀膜UV级石英 UV Grade Fused Silica (Corning 0F 7980 HPFS):常规尺寸:dia100.0 (±0.20) mm x 0.5 (± 0.10) mm边缘:CNC Ground表面质量:60/40 失效区域: 2.0 mm borderTTV:< 20 microns抛光情况:双面抛光(60/40)
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产品规格: | dia100x0.5mm;10x5x0.5mm;10x10x0.5mm |
标准包装: | 1000级超净室100级超净袋或单片盒包装 |
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