用于极紫外实验的多层膜镀膜技术

EUV多层膜是为像高次谐波应用这样的实验设计和制作的。在本文中，我们将展示适用于8nm -50nm波段的 Ru/B4C 、 Mo/Si、 Zr/Al Si和 SiC/Mg 多层膜的最新成果。这些多层膜都容易根据实验的具体要求定制参数，包括入射角、峰值波长和带宽。

图3. Mo/Si多层膜反射率实测图

图4. MoSi2/Si窄带多层膜和Ru/Si宽带多层膜的反射率（假设层间粗糙度为0.7 nm）

图7. Zr/Al-Si多层膜在入射角为45°时的反射率

图9.  Mo/Si宽带多层膜的反射率(蓝线)和反射相位(红虚线），6度入射

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