型号: | FY-S9 |
产地: | 以色列 |
品牌: | HOLO/OR |
评分: |
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HOLO/OR的M2转换模块是我们全面的一部分LeanLine的解决方案,我们提供为有兴趣做自己的线整形的客户提供独立的解决方案。该模块是一种经济高效的解决方案,使用多模(MM)激光器作为输入,可以在一个轴上获得近乎单模(SM)的光束质量。
HOLO/OR′s M2transformation module is a part of our full LeanLine solution, that we offer as a stand-alone solution for customers interested in doing their own line shaping. This module is a cost-effective solution to get almost-single mode (SM) beam quality in one axis, using a multi-mode (MM) laser as the input.
它非常容易对准,保持相同的光轴,并且具有低NA光学器件。使其易于与现有的线聚焦光学器件集成。与竞争解决方案不同,输入光束可以是圆形的,并且不需要是椭圆形的。只需将模块插入光路,经过一些微调后,您将获得M2变换后的光束。
It is extremely easy to align, maintains the same optical axis, and has low NA optics; making it easy to integrate with existing line focusing optics. Unlike with competing solutions, the input beam can be round, and is not required to be elliptical in shape. Just insert the module into your beam path, and after some fine adjustment you will have an M2 transformed beam.
衍射解决方案的优势
●基于内部开发的HOLO/OR′独特的IP。
Internally developed based on HOLO/OR′s unique IP.
●易于对准和安装–模块已预先对准并密封。
Easy alignment and installation – the module comes pre-aligned and sealed.
●通过光刻生产工艺实现光束质量转换的极高精度。
Extremely high precision for beam quality transformation, achieved by the lithography production process.
●完全透射(无反射)的同轴系统。
A fully transmissive (no reflection), on-axis system.
●无像差。
Aberration free.
●没有内部重点。
No internal focus points.
●在DUV 193nm*1940nm NIR的宽光谱范围内可用。
Available in a wide spectral range from DUV 193nm to 1940nm NIR.
●由高质量的紫外熔融石英制成,在所有表面上均具有大功率增透膜。
Made of high-quality UV fused silica with high power AR coating on all surfaces.
一般规格:
Wavelength: | 193-1940[nm] |
Input M2: | 12-30 |
Fast axis profile: | Flat-Top like |
Slow axis profile: | Separate sections |
Transmission: | > 93% |
Dimensions: | 30mm diameter, 600mm length |
* One wavelength per system, max spectral width 2% of input wavelength.
工作原理
输出形状由等距离分隔的部分组成,其中一个轴(快轴)的质量接近SM,第二个轴(慢轴)的高度MM。可以将这些分离的低M2部分重新塑形并聚焦到具有良好同质性的细衍射极限线。适合材料加工的应用需求。
M2转换模块模拟
以下是M2转换模块的模拟性能结果。上方的两个剖面显示了光束直径为343 nm的圆形多模激光源的强度和发散度。6毫米,发散度0.083度。通过使用我们的M2计算器,那些计算出的光束参数等效于 20 的M2。
圆形多模激光源的强度和散度
下图显示了M2转换模块出口处的强度和发散度。在具有小M2的轴上,光束的大小为0.65 mm,发散度为0.094度。计算出的M2为2.4。
精益生产线(TM)
LeanLine TM是HOLO/OR的创新解决方案,用于将圆形输入光束转换为窄激光线,可用于各种大功率应用,尤其是在UV和绿色波长(343、355和532 nm)的情况下。
HOLO/OR提供了一个强大的2-模块系统,该系统将低相干性的圆形输入转换为用户确定的长度(100mm-750mm)的窄线。
我们的解决方案基于专有的衍射光束整形概念,可以针对从193nm深紫外到1940nm IR激光器的任何波长进行定制。
通过使用该解决方案,您可以使用低功率,低成本的激光器在细线中实现相同的功率密度;提供大量节省。
激光532nm,线64mm x 28um
激光355nm,线100mm x 11um
沿激光线轮廓
衍射解决方案的优势
●易于对准和安装。
Easy alignment and installation.
●通过光刻生产工艺实现光束质量转换的极高精度。
Extremely high precision for beam quality transformation, achieved by the lithography production process.
●完全透射(无反射)的同轴系统。
A fully transmissive (no reflection), on-axis system.
●无像差。
Aberration free.
●可以轻松修改以产生不同的线长和宽度。
Can be easily modified to produce different line lengths and widths.
●没有内部重点。
No internal focus points.
●可提供从DUV到NIR的宽光谱范围。
Available in a wide spectral range from DUV to NIR.
该解决方案包括两个模块
●*个模块是M2转换模块。它用于光束质量转换和细线光束整形。
The first module is M2 transformation module. It is used for beam quality transformation and thin line beam shaping.
●第二个模块用于控制线长和在窄轴上聚焦。
The second module is used for line length control and focusing in the narrow axis.
应用范围
●激光剥离工艺和脱胶
Laser lift off processes & debonding.
●激光退火
Laser annealing.
●激光焊接
Laser Welding.
●薄膜太阳能电池生产
Thin-film solar cell production.
●直接激光干涉图案(DLIP)
Direct laser interference patterning (DLIP).
●OLED显示器
OLED displays.
材料
处理多种材料,包括:
●硅
Silicon
●玻璃上硅键合片
Silicon on glass.
●聚合物
Polymers.
●玻璃上的ITO
ITO on glass.
一般规格
Wavelength: | 343,355, 532 [nm] |
Input M2: | 12-25 |
Line length: | On demand |
Line uniformity: | <5% |
Line thickness FWHM: | < 20 [um] |
Efficiency: | > 75 % |
Working distance: | 125 [mm] |
Energy density at sample: | Laser power dependent |
Dimensions: | TBD |
Full System length: | TBD |
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