Ellipsometry

2020-09-04 17:02  下载量：0

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Ellipsometry is an optical method to derive the dielectric properties of thin films. Polarized incident light is reflected obliquely from the surface of the sample to generate ellipse of polarization reflected light in terms of amplitude ratio and phase difference, which is measured by a spectroscopic ellipsometer. Information about composition, roughness, thickness, doping concentration and other material characters can be yielded through it. Intrinsic physical properties of thin films can also be studied by the temperature dependence of ellipsometry.

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