ScanningElectronMicroscopy

2020-09-07 10:23  下载量：0

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Scanning Electron Microscopy (SEM) is one of the most versatile instruments for the examination of the surface topography and composition of the sample. The surface images result from the interaction of a focused electron beam with atoms in the sample, which can achieve < 1 nm resolution. Signals generated during the interaction include secondary electrons (SE), back-scattered electrons (BSE), characteristic X-ray and cathodoluminescence, absorbed current, and transmitted electrons. SE is the most standard signal that SEM detects. It has low energies, which leads to a higher resolution. BSE occurs in deeper places within the sample and strongly relates to the atomic number. It is very often used for composition analysis along with characteristic X-ray spectra. Many SEM measurements are conducted when the sample stage is cooled down to cryogenic temperatures based on different sample properties.

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