型号: | IT300 |
产地: | 日本 |
品牌: | 日本电子 |
评分: |
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Resolution HV mode | 3.0 nm (30 kV) 15.0 nm (1.0 kV) |
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Resolution LV mode | 4.0 nm (30 kV BED) |
Magnification | ×5 to ×300,000 |
Preset magnifications | 6 levels (Can be set by the user) |
Electron gun | Fully automatic/Manual adjustment available |
Filament | Factory pre-centered tungsten hairpin filament |
Accelerating voltage | 0.3 kV to 30 kV |
Probe current | 1 pA to 1 μA |
Low vacuum pressure setting range*1 | 10 to 650 Pa |
Condenser lens | High precision zoom condenser lens |
Objective lens | Conical lens |
Objective-lens aperture | 3-step selectable with click-stops Fine position adjustment in X and Y possible. |
Astigmatism memory | Available |
Image shift | ±50 μm (WD 10 mm) |
Automatic function | Focus Brightness/Contrast, astigmatism correction |
Specimen exchange | Changed by opening the specimen chamber door |
Maximum specimen | Diameter: 200 mm Height: 80 mm (WD10 mm) |
Specimen stage | Eucentric goniometer stage (5 axes motor drive stage) X:125 mm Y:100 mm Z:80 mm Tilt: -10 to 90° Rotation: 360° |
Recipe | Available |
Image mode | Secondary electron image, REF image, Composition image, Topographic image, Shadow image |
Comparison window (Snap shot) | 6 shots (Save, load, imaging condition can be reproduced) |
OS | Windows®7 |
Monitor | 23-inch touch panel (Display resolution 1,920 × 1,080) |
Number of pixels | 640 × 480 1,280 × 960 2,560 × 1,920 5,120 × 3,840 |
Image display mode | Multi view, Full screen view, Flexible view, Add Signals |
Look up table | Available (Gamma correction, pseudo-color) |
Histogram display | Available |
Measurement function | Available (Distance between 2 points, distance between parallel lines, diameter, etc.) |
3D measurement | Available*2 |
Anaglyph image | Available |
Report creation software | Built in |
Language configuration | Available on UI (Japanese/English) |
Image format | BMP,TIFF,JPEG |
Image auto save | Available |
Evacuation system | Fully automatic system TMP: 1 RP: 1 or 2 *1 |
Switching vacuum mode | Available on UI (HV/LV) |
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