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MCL 三轴纳米位移台HS3M

报价 面议

品牌

MCL关注纳米

型号

Nano-HS3M

产地

美洲美国

应用领域

暂无


Features
  • High speed

  • Low noise floor

  • Closed loop control

  • Picometer positioning resolution

  • High stability

  • Compact design



Typical Applications
  • High speed, high resolution positioning

  • Metrology

  • AFM

  • SPM




Product Description

The Nano-HS3M is a high speed, XYZ precision nanopositioning system with picometer positioning resolution. Offering maximum versatility, the Nano- HS3M is designed for demanding metrology applications. Internal position sensors utilizing proprietary PicoQ®technology provide absolute, repeatable position measurement under closed loop control. The compact footprint, ultra-low noise characteristics, and a Z-axis resonant frequency of 13.5kHz make it ideal for metrology applications that require picometer noise floors and high speed performance.



Technical Specifications

Range of motion (XY)10 μm
Range of motion (Z)5 μm
Resolution
0.01 nm
Resonant Frequency (X)1.6 kHz
Resonant Frequency (Y)1.5 kHz
Resonant Frequency (Z)13.5 kHz
Recommended max. load (horizontal)*0.1 kg
Recommended max. load (vertical)*0.1 kg
Body MaterialAluminum or Titanium
ControllerNano-Drive®
* Larger load requirements should be discussed with our engineering staff.



Position Noise Spectrum

The Nano-HS3M demonstrates less than 2 picometers of position noise on all three axes. Click below to enlarge and view the data for each axis.


X-Axis



Y-Axis


Z-Axis




Additional Information

Nano-HS3M Drawing
Nano-HS3M Catalog Pages



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MCL 三轴纳米位移台HS3M信息由北京欧兰科技发展有限公司为您提供,如您想了解更多关于MCL 三轴纳米位移台HS3M报价、型号、参数等信息,欧兰科技客服电话:400-860-5168转1446,欢迎来电或留言咨询。

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